Richard M Workman

US Patent:

7421899, Sep 9, 2008

Filed:

Jul 17, 2006

Appl. No.:

11/458000

Inventors:

Richard K. Workman - Los Altos CA, US
Storrs T. Hoen - Brisbane CA, US

Assignee:

Agilent Technologies, Inc. - Santa Clara CA

International Classification:

G01H 13/00

US Classification:

73579, 73 182, 73105

Abstract:

In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a microelectromechanical system (MEMS) actuator may be determined in-situ using a frequency resonance method.

US Patent:

7659509, Feb 9, 2010

Filed:

Oct 31, 2006

Appl. No.:

11/555220

Inventors:

Richard K. Workman - Sunnyvale CA, US
David Patrick Fromm - Palo Alto CA, US

Assignee:

Agilent Technologies, Inc. - Santa Clara CA

International Classification:

G01N 23/00
G21K 7/00
H01J 3/14

US Classification:

250310, 250306, 250307, 850 1, 850 2, 850 3, 33503, 33504, 73105

Abstract:

In accordance with the invention, a computer pointing device is interfaced with an SPM system to provide real time control of the SPM and improve the ease of use.

US Patent:

7987006, Jul 26, 2011

Filed:

Aug 29, 2007

Appl. No.:

11/846746

Inventors:

Daniel Y Abramovitch - Palo Alto CA, US
Storrs T. Hoen - Brisbane CA, US
Richard K. Workman - Sunnyvale CA, US

Assignee:

Agilent Technologies, Inc. - Santa Clara CA

International Classification:

G05B 13/02
G06F 19/00

US Classification:

700 42, 700 29, 850 4

Abstract:

Linear PID controllers have a transfer function that resembles the frequency response of a notch filter. The PID parameters, K, K, and K(proportional, integral, and derivative gains, respectively) can be extracted from the parameters of a linear notch filter. The linearized modes of scanning probe microscope (SPM) actuators have frequency responses that resemble those of simple second order resonance. Reasonable feedback control can be achieved by an inverse dynamics model of the resonance. A properly parameterized notch filter can cancel the dynamics of a resonance to give good closed-loop response.

US Patent:

8136389, Mar 20, 2012

Filed:

Oct 31, 2007

Appl. No.:

11/930439

Inventors:

Richard Paul Tella - Sunnyvale CA, US
Richard R. Workman - Sunnyvale CA, US
Storrs Townsend Hoen - Brisbane CA, US
David Patrick Fromm - Palo Alto CA, US

Assignee:

Agilent Technologies, Inc. - Santa Clara CA

International Classification:

H01J 37/00

US Classification:

73105

Abstract:

A probe assembly for a scanning probe microscope (SPM), a cartridge for a probe assembly for an SPM, and a method of attaching a probe tip to an SPM are described.

US Patent:

20080011044, Jan 17, 2008

Filed:

Jul 17, 2006

Appl. No.:

11/458017

Inventors:

Richard K. Workman - Los Altos CA, US
Storrs T. Hoen - Brisbane CA, US
George M. Clifford - Los Altos Hills CA, US

International Classification:

G12B 21/00
G12B 21/20

US Classification:

73 179, 73 189

Abstract:

In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ by application of a force to the scanning probe microscope cantilever.

US Patent:

20080011046, Jan 17, 2008

Filed:

Jul 17, 2006

Appl. No.:

11/458012

Inventors:

Richard K. Workman - Los Altos CA, US
Storrs T. Hoen - Brisbane CA, US
George M. Clifford - Los Altos Hills CA, US

International Classification:

G12B 21/00

US Classification:

73 189, 73 179

Abstract:

In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ using a displacement method.

US Patent:

20090112957, Apr 30, 2009

Filed:

Oct 31, 2007

Appl. No.:

11/981982

Inventors:

Daniel Yves Abramovitch - Palo Alto CA, US
Richard Kenton Workman - Sunnyvale CA, US

International Classification:

G06F 7/38

US Classification:

708313

Abstract:

Methods, systems and components for producing a scanning probe microscope (SPM) image. One method embodiment includes receiving sample data from a scanning probe microscope wherein said sample data comprises data sample many times per pixel of the SPM image to be displayed; selecting at least one decimation scheme from a plurality of different decimation schemes, for decimating the sample data to provide a single data value per pixel; and decimating the sample data, using the at least one selected decimation scheme. A method of decimating sample data scanned along scan lines from a surface of an object to be imaged includes at least temporarily storing multiple adjacent scan lines of the sample data prior to decimating at least a portion of the sample data; correlating adjacent samples of the sample data; and selecting a decimation scheme different from a decimation scheme previously selected to be applied to sample data within a pixel pertaining to an image to be formed from the sample data, when correlating provides results in which a value from one line of comparison is different from a value from another line of comparison by at least a predetermined value, but otherwise maintaining the previously selected decimation scheme for decimating the sample data pertaining to that pixel.

US Patent:

20090139313, Jun 4, 2009

Filed:

Dec 3, 2007

Appl. No.:

11/949578

Inventors:

David Patrick Fromm - Palo Alto CA, US
Richard Kenton Workman - Sunnyvale CA, US
John Paul Flowers - San Jose CA, US

International Classification:

G01B 5/28

US Classification:

73105

Abstract:

A scanning probe microscope and method for using the same are disclosed. The scanning probe microscope includes a probe, an electromechanical actuator that moves the sample relative to the probe, an external interface, and a controller. The probe has a tip that moves in response to an interaction between the tip and a local characteristic of a sample. The external interface provides a connection between the scanning probe microscope and a device external to the scanning probe microscope. The controller records scanning probe microscope data measurements, each scanning probe microscope data measurement including a location of the probe in the three dimensions and a label that uniquely identifies that measurement and allows that measurement to be correlated with data generated by a device that is external to the scanning probe microscope. The unique label could include the time at which the data measurement was made.