Rajiv Agarwal - North Wales PA, US George Ryals - Newton NJ, US Wei Cao - Orefield PA, US John Cirucci - Schnecksville PA, US Robert Apollo - Swedesboro NJ, US Daniel McNesby - New Hope PA, US
Method for the purification of a volatile metal hydride comprising obtaining a volatile metal hydride feed containing one or more acidic impurities, one of which is a sulfur-containing impurity; contacting the feed with an alkaline material and reacting at least a portion of the sulfur-containing impurity with the alkaline material to remove a portion of the sulfur-containing impurity from the feed and provide an intermediate purified material; and contacting the intermediate purified product with an adsorbent material to remove at least a portion of the sulfur-containing impurity from the intermediate purified material and provide a purified volatile metal hydride product.
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