Robert Denny Barnett

US Patent:

7468611, Dec 23, 2008

Filed:

Oct 19, 2007

Appl. No.:

11/875655

Inventors:

Kent Nguyen - San Jose CA, US
Eric Thompson - San Jose CA, US
Hai Tran - San Jose CA, US
Kaushal Gangakhedkar - San Jose CA, US
Robert Barnett - San Jose CA, US
Daniel Toet - Santa Clara CA, US
David Baldwin - Atascadero CA, US
Steve Aochi - Morgan Hill CA, US
Neil Nguyen - Milpitas CA, US

Assignee:

Photon Dynamics, Inc. - San Jose CA

International Classification:

G01R 31/00
G01R 31/02

US Classification:

324754, 324770, 3241581

Abstract:

A system performs continuous full linear scan of a flat media. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.

US Patent:

7543867, Jun 9, 2009

Filed:

Mar 23, 2006

Appl. No.:

11/389556

Inventors:

Digby Pun - San Jose CA, US
Kent Nguyen - San Jose CA, US
Robert Barnett - San Jose CA, US

Assignee:

Photon Dynamics, Inc. - San Jose CA

International Classification:

B66C 1/02

US Classification:

294 641, 294 643

Abstract:

A vacuum gripper for use in substrate positioning operations includes a vacuum pad adapted to make contact with the substrate and a shaft connected to the vacuum pad. The shaft is characterized by a first diameter at a portion of the shaft proximal to the vacuum pad and a second diameter at a portion of the shaft distal to the vacuum pad. The vacuum gripper also includes a first air bearing surrounding the portion of the shaft proximal to the vacuum pad, a second air bearing surrounding the portion of the shaft distal to the vacuum pad, and an air source in fluid communication with the first air bearing and the second air bearing. The vacuum gripper further includes an exhaust port, a valve in fluid communication with the exhaust port, and a first flow restrictor in fluid communication with the valve.

US Patent:

20070045566, Mar 1, 2007

Filed:

Aug 29, 2006

Appl. No.:

11/468206

Inventors:

Barry McGinley - San Jose CA, US
Lloyd Jones - San Jose CA, US
Digby Pun - San Jose CA, US
Robert Barnett - San Jose CA, US

Assignee:

Photon Dynamics, Inc. - San Jose CA

International Classification:

G01N 23/00

US Classification:

250491100

Abstract:

The position of a substrate's edge is detected using a substrate alignment system that includes, in part, a light source, an optical module adapted to receive a light emanating from the light source to form a multi-dimensional light beam; and an array sensor positioned at a focal plane of the optical module and oriented substantially perpendicular to the sample's edge. The substrate alignment system detects the substrate's edge position as soon as the substrate is loaded and placed within the capture range of the linear array sensor. As long as the substrate's edge position is within the capture range, the substrate does not have to be moved to determine its position relative to the tool's coordinate space. The capture range is substantially larger than the position accuracy required. The sensor array includes a multitude of sensors disposed along one or more rows.