Robert Dale Conner

US Patent:

62356348, May 22, 2001

Filed:

May 20, 1998

Appl. No.:

9/082483

Inventors:

John M. White - Hayward CA
Robert B. Conner - Mountain View CA
Kam S. Law - Union City CA
Norman L. Turner - Mountain View CA
William T. Lee - Pleasanton CA
Shinichi Kurita - San Jose CA

Assignee:

Applied Komatsu Technology, Inc. - Tokyo

International Classification:

H01L 2144

US Classification:

438680

Abstract:

The invention provides an apparatus and method for performing a process on a substrate. At least two types of structures may be used to provide a flow path for a substrate so that the substrate may be moved from one processing or loading position to another. The first is a conveyor. The second is a track. The flow path may be a closed continuous loop. Each processing island has a valve for introduction and extraction of the substrate into and out of an interior of the island. The processing island may include load locks, and may include in conjunction therewith an inspection station, a CVD chamber, a PECVD chamber, a PVD chamber, a post-anneal chamber, a cleaning chamber, a descumming chamber, an etch chamber, or a combination of such chambers.