Robert C Key

US Patent:

20020037693, Mar 28, 2002

Filed:

Aug 7, 2001

Appl. No.:

09/924067

Inventors:

Wayne Lougher - Phoenix AZ, US
Frank McPeek - Tempe AZ, US
Robert Key - Phoenix AZ, US

International Classification:

B24B047/26

US Classification:

451/398000, 451/442000, 451/288000

Abstract:

A wafer carrier retaining ring includes a first annular surface that contacts a polishing surface during a polishing process and an inner diameter surface adjoining the first annular surface thereby forming a first annular corner. The first annular corner has a radius in the range of from no less than about 0.010 inches to less than a radius that would result in damage to a wafer being polished. In another embodiment of the invention, a wafer carrier retaining ring includes an inner diameter surface and a second annular surface adjoining said inner diameter surface thereby forming a second annular corner. The second annular corner has a radius of no less than 0.030 inches. In a further embodiment of the invention, a wafer carrier retaining ring is formed of a ceramic material and has a first annular surface having a surface finish of no greater than 2 microinches rms.

US Patent:

41578180, Jun 12, 1979

Filed:

Dec 1, 1977

Appl. No.:

5/856472

Inventors:

Robert T. Key - Phoenix AZ

Assignee:

Motorola, Inc. - Schaumburg IL

International Classification:

G01B 1126

US Classification:

269 73

Abstract:

A workholder stage that includes and X-Y movable work mounting plate, a stationary base plate, an intermediate coupling plate and two pairs of perpendicularly oriented leaf springs. One pair of leaf springs is connected to the base plate and to the intermediate coupling plate while the other pair is connected to the work mounting plate and to the intermediate coupling plate.