Robert J Larson

US Patent:

6979165, Dec 27, 2005

Filed:

Nov 12, 2002

Appl. No.:

10/292147

Inventors:

Robert E. Larson - Mound MN, US
Sean D. Simondet - Shakopee MN, US
David C. Zimmerman - Prior Lake MN, US
Todd K. Maciej - Little Falls MN, US
Quirin W. Matthys - St. Bonifacius MN, US

Assignee:

FSI International, Inc. - Chaska MN

International Classification:

B65H001/00

US Classification:

41422605, 414939, 41422201

Abstract:

The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.

US Patent:

7134827, Nov 14, 2006

Filed:

Sep 28, 2004

Appl. No.:

10/952506

Inventors:

Robert E. Larson - Mound MN, US
Sean D. Simondet - Shakopee MN, US
David C. Zimmerman - Prior Lake MN, US
Todd K. Maciej - Little Falls MN, US
Quirin W. Matthys - St. Bonifacius MN, US

Assignee:

FSI International, Inc. - Chaska MN

International Classification:

B65G 65/34

US Classification:

41441601, 414422, 414938, 414941, 414811

Abstract:

The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.

US Patent:

20130341370, Dec 26, 2013

Filed:

Mar 28, 2013

Appl. No.:

13/852870

Inventors:

Robert J. Larson - Coon Rapids MN, US

International Classification:

B62B 5/00

US Classification:

224411

Abstract:

An organizer attachment for a shopping cart for securing desired items, such as a grocery list and/or shopping coupons, as well as possibly other device such as a writing utensil, locator, calculator, or price tracker. The organizer attachment is coupled to a desired surface, such as a portion of a shopping cart. The organizer may be removable or positionable to accommodate a stored configuration of the cart. The organizer includes one or more retention areas for retaining the desired items to the organizer.

US Patent:

41394542, Feb 13, 1979

Filed:

Oct 6, 1977

Appl. No.:

5/840109

Inventors:

Robert W. Larson - Mesa AZ

International Classification:

B03B 906

US Classification:

209 12

Abstract:

A mechanized reclaiming system for separating ferrous and non-ferrous metals from other materials derived from crushed and shredded automobiles employing a pair of conveyors mounted in a vertical array with the top one separating under vibratory action the small particles of material from the larger particles with the small particles going to a processing tower with this material being processed again into lighter and heavier materials. The lighter material is separated further by centrifugal action while the heavier material is separated into magnetic and non-magnetic material by magnetic means with the non-magnetic material being further separated into light and heavier material through water treatment in a rotating drum.

US Patent:

20160276182, Sep 22, 2016

Filed:

Mar 23, 2016

Appl. No.:

15/078338

Inventors:

- Chaska MN, US
David C. Zimmerman - Prior Lake MN, US
Robert E. Larson - Mound MN, US
Edward Deneen Hanzlik - Shorewood MN, US
Gregory Paul Thomes - Chaska MN, US
Christina Ann Rathman - Ellsworth WI, US

International Classification:

H01L 21/67
H01L 21/02
H01L 21/687
B08B 15/02
B08B 5/02

Abstract:

An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.

US Patent:

20150068560, Mar 12, 2015

Filed:

Sep 10, 2013

Appl. No.:

14/022979

Inventors:

- Chaska MN, US
David C. ZIMMERMAN - Prior Lake MN, US
Robert E. LARSON - Mound MN, US
Edward Deneen HANZLIK - Shorewood MN, US
Gregory Paul THOMES - Chaska MN, US
Christina Ann RATHMAN - Ellsworth WI, US

Assignee:

TEL FSI, Inc. - Chaska MN

International Classification:

H01L 21/67
B08B 5/02

US Classification:

134 33, 15302

Abstract:

An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.