Robert J May

US Patent:

7798758, Sep 21, 2010

Filed:

Nov 7, 2006

Appl. No.:

11/594365

Inventors:

Michael L. Bufano - Belmont MA, US
Ulysses Gilchrist - Reading MA, US
William Fosnight - Carlisle MA, US
Christopher Hofmeister - Hampstead NH, US
Daniel Babbs - Austin TX, US
Robert C. May - Austin TX, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

B65H 1/00

US Classification:

41422201, 414266

Abstract:

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

US Patent:

8267634, Sep 18, 2012

Filed:

May 11, 2007

Appl. No.:

11/803077

Inventors:

Michael L. Bufano - Belmont MA, US
Ulysses Gilchrist - Reading MA, US
William Fosnight - Carlisle MA, US
Christopher Hofmeister - Hampstead NH, US
Daniel Babbs - Austin TX, US
Robert C. May - Austin TX, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

B65G 1/00

US Classification:

4142171, 414940, 104281

Abstract:

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

US Patent:

8272827, Sep 25, 2012

Filed:

Aug 13, 2007

Appl. No.:

11/891835

Inventors:

Michael L. Bufano - Belmont MA, US
Ulysses Gilchrist - Reading MA, US
William Fosnight - Carlisle MA, US
Christopher Hofmeister - Hampstead NH, US
Daniel Babbs - Austin TX, US
Robert C. May - Austin TX, US

International Classification:

B65G 1/00

US Classification:

4142171, 414940

Abstract:

In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

US Patent:

8328495, Dec 11, 2012

Filed:

Aug 19, 2009

Appl. No.:

12/544064

Inventors:

Michael L. Bufano - Belmont MA, US
Ulysses Gilchrist - Reading MA, US
William Fosnight - Carlisle MA, US
Christopher Hofmeister - Hampstead NH, US
Daniel Babbs - Austin TX, US
Robert C. May - Austin TX, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

B65G 1/00

US Classification:

414288, 414935, 414937

Abstract:

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

US Patent:

20070201967, Aug 30, 2007

Filed:

Nov 3, 2006

Appl. No.:

11/556584

Inventors:

Michael Bufano - Belmont MA, US
Ulysses Gilchrist - Reading MA, US
William Fosnight - Carlisle MA, US
Christopher Hofmeister - Hampstead NH, US
Daniel Babbs - Austin TX, US
Robert May - Austin TX, US

International Classification:

B65H 1/00

US Classification:

414222010, 414935000

Abstract:

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

US Patent:

20080107507, May 8, 2008

Filed:

Apr 18, 2007

Appl. No.:

11/787981

Inventors:

Michael L. Bufano - Belmont MA, US
Ulysses Gilchrist - Reading MA, US
William Fosnight - Carlisle MA, US
Chrstopher Hofmeister - Hampstead NH, US
Daniel Babbs - Austin TX, US
Robert C. May - Austin TX, US

International Classification:

H01L 21/677

US Classification:

4142171

Abstract:

A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

US Patent:

20090129897, May 21, 2009

Filed:

May 19, 2008

Appl. No.:

12/123391

Inventors:

Daniel Babbs - Austin TX, US
William Fosnight - Carlisle MA, US
Robert C. May - Austin TX, US
William Weaver - Austin TX, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H01L 21/677
H01L 21/68

US Classification:

414217, 414805, 41422205, 414800

Abstract:

A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

US Patent:

20110008136, Jan 13, 2011

Filed:

Sep 20, 2010

Appl. No.:

12/886301

Inventors:

Michael L. Bufano - Belmont MA, US
Ulysses Gilchrist - Reading MA, US
William Fosnight - Carlisle MA, US
Christopher Hofmeister - Holderness NH, US
Daniel Babbs - Austin TX, US
Robert C. May - Austin TX, US

Assignee:

Brooks Automation, Inc. - Chelmsford MA

International Classification:

H01L 21/677

US Classification:

414217

Abstract:

A load port including a frame defining a load port opening, a substrate carrier interface connected to the frame and configured to removably couple with a substrate carrier shell, a load port door configured to interface with a substrate carrier door, the load port door being movably coupled to frame and having a first position substantially blocking the load port opening, and a second position where the load port opening is substantially unblocked by the load port door, and a door coupling member without moving parts, located on the load port door configured to releasably couple with a corresponding member without moving parts on the substrate carrier door, wherein activation of the door coupling member effects coupling between the load port door and substrate carrier door and a passive release of the substrate carrier door from the substrate carrier shell.

Address:

5302 N Scout Is Cir, Austin, TX 78731

VIN:

WBANE735X7CM57332

Make:

BMW

Model:

5 SERIES

Year:

2007