Robert Kelly Mcandrew

US Patent:

20120111379, May 10, 2012

Filed:

Nov 4, 2010

Appl. No.:

12/939896

Inventors:

Ronda K. Nixon - San Francisco CA, US
Iqbal A. Shareef - Fremont CA, US
Mark I. Wagner - Austin TX, US
Robert McAndrew - Austin TX, US
Tony Ray Kroeker - Georgetown TX, US

International Classification:

B08B 3/00

US Classification:

134198

Abstract:

A processing chamber for post-wet-etch removing of drying fluid (DF) is disclosed. The chamber includes a chamber wall surrounding a processing volume and a plurality of nozzles disposed annularly about the processing volume and arranged into a set of nozzle rows that includes at least one nozzle row. The chamber also includes a plenum and a set of manifolds coupled to the plurality of nozzles to deliver the supercritical COto the plurality of nozzles. Each nozzle has a nozzle outlet directed toward an interior portion of the processing volume and the nozzles are configured to flow the supercritical COtoward the substrates in a manner that minimizes recirculation loops and vortices.

US Patent:

60576626, May 2, 2000

Filed:

Feb 25, 1998

Appl. No.:

9/030147

Inventors:

Robert M. McAndrew - Austin TX
Tony Kroeker - Georgetown TX

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G05B 1910

US Classification:

318567

Abstract:

A substrate handler for use in a chamber in a vacuum processing system has a single motor for controlling the substrate handler's rotation and extension functions. The single motor is connected to an operating assembly that operates in two modes to alternatively rotate or extend the substrate handler. The two modes are defined by the relative rotational motion of two drive mechanisms that are rotated by the single motor. When the relative rotational motion for the two drive mechanisms is in the same axial direction, then the operating assembly operates in the first mode. When the relative rotational motion for the two drive mechanisms is in the opposite axial direction, then the operating assembly operates in the second mode. The single motor operates one of the drive mechanisms and an assembly that alternatively operates the other drive mechanism in either the same or the opposite axial direction as the first drive mechanism. Under this operation, the substrate handler alternatively rotates or extends depending on whether the drive mechanisms rotate in the same or opposite axial directions.

US Patent:

61739383, Jan 16, 2001

Filed:

Sep 22, 1998

Appl. No.:

9/158597

Inventors:

Robert McAndrew - Austin TX

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

F16K 3112

US Classification:

251 31

Abstract:

A multi-speed slit valve apparatus and method of actuating a slit valve apparatus at least at two distinct speeds is provided. The slit valve apparatus includes a pneumatic cylinder 210 having a primary channel 254, 266 and auxiliary channel 258, 270 at each end, wherein the auxiliary channels 258, 270 have a cross sectional area smaller than that of the primary channels 254, 266. A piston 226 defining a front volume 240 and a back volume 242 is disposed in the cylinder 210 and is reciprocally actuated by a compressed fluid such as air. At a predetermined stage during the cylinder's out-stroke and in-stroke the primary channels 254, 266 become sealed from the front and back volumes 240, 242, respectively, such that during the remainder of the stroke the fluid is biased to exhaust through the auxiliary channels 258, 270.

US Patent:

20180124960, May 3, 2018

Filed:

Oct 27, 2016

Appl. No.:

15/336279

Inventors:

- Santa Clara CA, US
Michael Kuchar - Georgetown TX, US
Dean C. Hruzek - Cedar Park TX, US
Vijayabaskar Soundarrajan - Bangalore, IN
Pandu Maddherla - Bangalore, IN
Adam J. Wyatt - Round Rock TX, US
Robert M. McAndrew - Austin TX, US

International Classification:

H05K 13/02
H05K 7/20
H05K 7/14

Abstract:

An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.