Robert Anthony O'Neil

US Patent:

20140113453, Apr 24, 2014

Filed:

Oct 24, 2012

Appl. No.:

13/659328

Inventors:

- Fremont CA, US
Lin Xu - Katy TX, US
John Michael Kerns - Livermore CA, US
Anthony Amadio - San Mateo CA, US
Duane Outka - Fremont CA, US
Yan Fang - Fremont CA, US
Allan Ronne - Santa Clara CA, US
Robert G. O'Neil - Fremont CA, US
Rajinder Dhindsa - San Jose CA, US
Travis Taylor - Fremont CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 21/3065
H01L 21/306
C23C 16/32
B32B 3/30
B32B 15/04
C23C 28/00

US Classification:

438710, 428627, 205192, 42724918, 4271261, 427123, 428457, 428612, 15634548, 257E21218

Abstract:

A tungsten carbide coated chamber component of semiconductor processing equipment includes a metal surface, optional intermediate nickel coating, and outer tungsten carbide coating. The component is manufactured by optionally depositing a nickel coating on a metal surface of the component and depositing a tungsten carbide coating on the metal surface or nickel coating to form an outermost surface.