Robert M O'Neill

US Patent:

7402922, Jul 22, 2008

Filed:

Dec 5, 2005

Appl. No.:

11/294097

Inventors:

Jeffery T. Springer - La Honda CA, US
James L. Kirschman - El Dorado Hills CA, US
Robert M. O'Neill - Oxford MS, US
Conrad P. Sandoval - Roseville CA, US
Joseph B. Young - Paducah KY, US

Assignee:

Renaissance Sound LLC - El Dorado Hills CA

International Classification:

H02K 41/00
H04R 25/00
H04R 9/06

US Classification:

310 15, 310 36, 381396, 335209, 335238

Abstract:

A tactile wave generating apparatus and method to generate amplified low frequency waves which are then transmitted as tactile waves into a structure and/or to a persons anatomy. There is a housing in which is positioned a drive section that in turn comprises a magnet section that moves upwardly and downwardly as an inertial mass, two coils on opposite sides of the magnet and two flux path return plates for the coils. Each coil comprises upper and lower longitudinally aligned generally linear coil portions which drive the magnet section upwardly and downwardly. The magnet section is supported by upper and lower interconnecting sections that resiliently resist the up and down motion of the magnet section and restrain the magnet section to move up and down within close tolerances.

US Patent:

7557471, Jul 7, 2009

Filed:

Jun 30, 2008

Appl. No.:

12/216131

Inventors:

Jeffery T. Springer - La Honda CA, US
James L. Kirschman - El Dorado Hills CA, US
Robert M. O'Neill - Oxford MS, US
Conrad P. Sandoval - Roseville CA, US
Joseph B. Young - Paducah KY, US

Assignee:

Renaissance Sound, LLC - El Dorado Hills CA

International Classification:

H02K 41/00
H04R 5/02

US Classification:

310 15, 310 36, 381396, 335209, 335238

Abstract:

A tactile wave generating apparatus for generating amplified low frequency waves for transmission as tactile waves into a structure or a person's body. There is a housing in which is positioned a drive section that in turn comprises a magnet section that moves upwardly and downwardly as an inertial mass, two coils on opposite sides of the magnet and two flux path return plates for the coils. Each coil comprises upper and lower longitudinally aligned generally linear coil portions which drive the magnet section upwardly and downwardly. The magnet section is supported by upper and lower interconnecting sections that resiliently resist the up and down motion of the magnet section and restrain the magnet section to move up and down within close tolerances.

US Patent:

8060330, Nov 15, 2011

Filed:

Dec 12, 2008

Appl. No.:

12/334275

Inventors:

Robert Griffith O'Neill - Fremont CA, US
Jorge Luque - Redwood City CA, US
Harmeet Singh - Fremont CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

G06F 19/00
G06F 17/40

US Classification:

702105, 438 14, 702 90, 702187, 702189

Abstract:

A wafer handling mechanism is operated to place a wafer on a chuck. A chucking force is then applied to the wafer, whereby wafer support features of the chuck transfer a defect pattern onto a surface of the wafer. The surface of the wafer is analyzed by a defect metrology tool to obtain a mapping of the defect pattern transferred onto the surface of the wafer. A center coordinate of the chuck within a coordinate system of the wafer is determined by analyzing the defect pattern as transferred to the surface of the wafer. A spatial offset between the center coordinate of the chuck and the center of the wafer is determined. The spatial offset is used to adjust the wafer handling mechanism so as to enable alignment of the center of the wafer to the center coordinate of the chuck.

US Patent:

20130102156, Apr 25, 2013

Filed:

Sep 24, 2012

Appl. No.:

13/625489

Inventors:

Lam Research Corporation - Fremont CA, US
Hong Shih - Walnut CA, US
Robert G. O'Neill - Fremont CA, US
Tae Won Kim - Dublin CA, US
Raphael Casaes - Santa Clara CA, US
Yan Fang - Fremont CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B05B 1/00
B32B 3/02
H01L 21/3065
B32B 3/30
B05D 3/12
C23C 16/44

US Classification:

438710, 427331, 4272481, 427289, 428155, 428 666, 239589, 257E21218

Abstract:

A component of a plasma processing chamber includes a three dimensional body having a highly dense plasma resistant coating thereon wherein a plasma exposed surface of the coating has a texture which inhibits particle generation from film buildup on the plasma exposed surface. The component can be a window of an inductively coupled plasma reactor wherein the window includes a textured yttria coating. The texture can be provided by contacting the plasma exposed surface with a polishing pad having a grit size effective to provide intersecting scratches with a depth of 1 to 2 microns.

US Patent:

20140034242, Feb 6, 2014

Filed:

Jul 31, 2012

Appl. No.:

13/562675

Inventors:

Sanket P. Sant - Fremont CA, US
Robert Griffith O'Neill - Fremont CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 21/3065
B23P 25/00

US Classification:

15634551, 29458

Abstract:

A two piece edge ring assembly is configured to surround a semiconductor substrate in a plasma processing chamber wherein plasma is generated and used to process the semiconductor substrate. The edge ring assembly comprises upper and lower rings which have an outer protective coating. The upper and lower rings are configured such that the upper ring is supported on an outer portion of the upper surface of the lower ring and the protective coatings are on plasma exposed surfaces of the upper and lower rings.

US Patent:

41145275, Sep 19, 1978

Filed:

Sep 9, 1977

Appl. No.:

5/831788

Inventors:

Robert S. O'Neill - El Cerrito CA

International Classification:

B65B 1338

US Classification:

100 2

Abstract:

A bale tying device whereby a wire is secured by knots around a bale of material, the device comprising means for receiving the distal portions of the wire in spaced, parallel relationship with the wire ends extending past each other in the opposite directions, means for bending each other in the opposite directions, means for bending each wire distal portion in the direction of the other distal portion at an angle so that each distal end passes through the vertical plane of those portions of the wire which are not bent and means for folding the distal ends about each unbent portion of the wire to form an open rectangular link or knot in which portion of each wire is looped around the other wire and then angles downwardly and in engagement with the bale.

US Patent:

20190013232, Jan 10, 2019

Filed:

Sep 14, 2018

Appl. No.:

16/131822

Inventors:

- Fremont CA, US
Robert Griffith O'NEILL - Hayward CA, US
Raphael CASAES - Alameda CA, US
Jon MCCHESNEY - Fremont CA, US
Alex PATERSON - San Jose CA, US

International Classification:

H01L 21/687
H01J 37/32
H01J 37/02
H01L 21/67
H01J 37/20

Abstract:

An edge ring is configured to be raised and lowered relative to a pedestal, via one or more lift pins, in a processing chamber of a substrate processing system. The edge ring includes an upper surface, an annular inner diameter, an annular outer diameter, a lower surface, and at least one feature arranged in the lower surface of the edge ring. At least one inner surface of the at least one feature is sloped.

US Patent:

20160211166, Jul 21, 2016

Filed:

May 6, 2015

Appl. No.:

14/705430

Inventors:

- Fremont CA, US
Robert Griffith O'Neill - Hayward CA, US
Raphael Casaes - Alameda CA, US
Jon McChesney - Fremont CA, US
Alex Paterson - San Jose CA, US

International Classification:

H01L 21/687
H01L 21/66
H01L 21/67

Abstract:

A substrate processing system includes a processing chamber and a pedestal arranged in the processing chamber. An edge coupling ring is arranged adjacent to a radially outer edge of the pedestal. A first actuator is configured to selectively move the edge coupling ring to a raised position, relative to the pedestal to provide clearance between the edge coupling ring and the pedestal to allow a robot arm to remove the edge coupling ring from the processing chamber.