Robert W Prater

US Patent:

7374648, May 20, 2008

Filed:

Jun 28, 2004

Appl. No.:

10/880172

Inventors:

Len Hom - Dublin CA, US
John D. Mize - Spokane Valley WA, US
Robert M. Prater - Los Altos CA, US
David K. Chan - San Francisco CA, US
Gilbert Amador - Dublin CA, US
Peter J. Kang - San Jose CA, US

Assignee:

Honeywell International Inc. - Morristown NJ

International Classification:

C23C 14/35
C23C 16/00

US Classification:

20429806, 20429811, 20429808, 2041921, 20419212, 118723 I, 118723 IR, 15634548

Abstract:

The invention includes a coil support assembly having an insulator interfacing a surface of a shield disposed within a processing chamber. The insulator has an extension which extends through the shield. A second insulator is disposed between the shield and a coil and contacts a protrusion extending from the coil. A fastener is disposed through the first insulator and extends through the second insulator and into the protrusion. The fastener is electrically isolated from the shield by the first insulator. The invention includes coil assemblies containing the described coil support configuration. The invention further includes a method of supporting a coil within a processing chamber having a shield disposed therein. Insulators are inserted to extend from an outer side of the shield through a thickness of the shield. A coil is mounted within the chamber by inserting fasteners through each insulator into bosses which-protrude outwardly from the coil body.