Robert D Prater

US Patent:

7618520, Nov 17, 2009

Filed:

Sep 23, 2005

Appl. No.:

11/234615

Inventors:

Chi tse Wu - Veradale WA, US
Stephane Ferrasse - Veradale WA, US
Frank C. Alford - Veradale WA, US
Susanne Grabmeier - Munich, DE
Werner H. Hort - Cranberry PA, US
Jaeyeon Kim - Liberty Lake WA, US
Susan D. Strothers - Spokane WA, US
Andrew Wragg - Cheshire, GB
Robert Prater - Los Altos CA, US

Assignee:

Honeywell International Inc. - Morristown NJ

International Classification:

C23C 14/35

US Classification:

20429812, 20429813

Abstract:

The invention includes a target construction having a sputtering region and a flange region laterally outward relative to the sputtering region. The flange region has a front surface disposed on a front face of the construction and a back surface opposing the front surface. An o-ring groove is disposed within the flange region. The o-ring groove has a planar base surface which has a first width and has an orifice disposed along the front surface of the flange. The orifice has a second width as measured parallel relative to the base surface. The second width is greater than the first width. The flange surfaces can additionally be protected from rubbing by a layer of protective material.