Roger A Robbins

US Patent:

6365229, Apr 2, 2002

Filed:

Sep 27, 1999

Appl. No.:

09/406386

Inventors:

Roger A. Robbins - Allen TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

C23C 1400

US Classification:

4272481, 42725514, 4272556, 427314, 427294, 118715, 118719, 118726

Abstract:

A method and system for applying a surface treatment to an object. The system comprises: a source chamber ( ) for holding a source of surface treatment material ( ); a deposition chamber ( ) enclosing the object to be treated ( ); a recovery chamber ( ); a supply of carrier gas ( ); conduit ( ) connecting the source chamber ( ) to the deposition chamber ( ) and the deposition chamber ( ) to the recovery chamber ( ) and for controlling the flow of the carrier gas between the source chamber ( ), the deposition chamber ( ) and the recovery chamber; and a heater ( ) for heating the source chamber ( ), the source of surface treatment material ( ), the deposition chamber ( ), an upper portion ( ) of the recovery chamber ( ), the carrier gas, and the conduit ( ). When heated, the source material ( ) evaporates into the carrier gas and is carried to the deposition chamber ( ) where is attaches to the surface of the object being treated ( ). The depleted carrier gas is then delivered to the cooler lower portion ( ) of the recovery chamber ( ) where it condenses out of the carrier gas.

US Patent:

6921680, Jul 26, 2005

Filed:

Dec 30, 2002

Appl. No.:

10/331319

Inventors:

Roger A. Robbins - McKinney TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H01L021/00

US Classification:

438 51, 359291, 508524

Abstract:

A nebulization system, which creates a uniform fog of tiny suspended liquid droplets, to lubricate the surfaces of MEMS devices. These droplets fall over the edge of a baffle and are then mixed with an umbrella-like sheet of Nturbulation gas to generate a uniform cloud of droplets that fill a passivation chamber. The MEMS device is then positioned in this uniform cloud of lubricant droplets for a specified amount of time, thereby uniformly lubricating all the surfaces of the device. The system uses a laser monitoring approach to control the uniformity of the lubricant cloud by providing feedback to the system to control the flow of gases. The system also equalizes the pressure around the sample device seal to prevent gases from entering or exiting the chamber and thereby influencing the environment inside the chamber.

US Patent:

6992375, Jan 31, 2006

Filed:

Nov 13, 2001

Appl. No.:

10/007964

Inventors:

Roger A. Robbins - McKinney TX, US
Jwei Wien Liu - Plano TX, US
Jack C. Smith - Parker TX, US
Edward Carl Fisher - Lucas TX, US
Joyce Wong Holton - Plano TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H01L 23/20
H01L 23/02
H01L 29/82
H03J 3/20

US Classification:

257682, 257414, 257415, 257416, 257419, 257732, 257774, 257680, 331167, 359290, 359291, 359224, 359298, 15634543, 438 50, 438 22, 438 52, 361762, 361761, 174256, 174 524

Abstract:

An anchor to hold getter materials in place within a micromechanical device package substrate. First and second cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. The getter anchor may be formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion—formed in the middle layer and a relatively narrower top portion—formed by the top layer. The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity.

US Patent:

7264179, Sep 4, 2007

Filed:

Apr 1, 2005

Appl. No.:

11/096479

Inventors:

Roger A. Robbins - McKinney TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

A62C 31/00
F23D 11/16
B05B 7/06
A61M 11/02

US Classification:

239398, 239419, 239427, 2394273, 239434, 2394345, 239366

Abstract:

A nebulization system, which creates a uniform fog of tiny suspended liquid droplets, to lubricate the surfaces of MEMS devices. These droplets fall over the edge of a baffle and are then mixed with an umbrella-like sheet of Nturbulation gas to generate a uniform cloud of droplets that fill a passivation chamber. The MEMS device is then positioned in this uniform cloud of lubricant droplets for a specified amount of time, thereby uniformly lubricating all the surfaces of the device. The system uses a laser monitoring approach to control the uniformity of the lubricant cloud by providing feedback to the system to control the flow of gases. The system also equalizes the pressure around the sample device seal to prevent gases from entering or exiting the chamber and thereby influencing the environment inside the chamber.

US Patent:

20060138642, Jun 29, 2006

Filed:

Jan 31, 2006

Appl. No.:

11/343395

Inventors:

Roger Robbins - McKinney TX, US
Jwei Liu - Plano TX, US
Jack Smith - Parker TX, US
Edward Fisher - Lucas TX, US
Joyce Holton - Plano TX, US

International Classification:

H01L 23/12

US Classification:

257704000, 257E23137, 257913000

Abstract:

One embodiment provides an anchor to hold getter materials in place within a micromechanical device package substrate, said anchor comprising: a first cavity face; and a second cavity face. The cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. Another embodiment provides an anchor to hold a getter in place within a micromechanical device package. The anchor comprises: a package substrate; and a member attached to the package substrate, the member shaped to provide mechanical retention of the getter material formed over said member. Another embodiment provides a micromechanical device package comprising: a package substrate; a package lid enclosing a package cavity; a micromechanical device in the package cavity; and a getter anchor in the package cavity. Other embodiments provide methods of packaging and forming packages having a getter anchor. One getter anchor is formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion-formed in the middle layer and a relatively narrower top portion-formed by the top layer . The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

US Patent:

20070177246, Aug 2, 2007

Filed:

Apr 7, 2007

Appl. No.:

11/697720

Inventors:

Roger Robbins - McKinney TX, US
Jwei Liu - Plano TX, US
Jack Smith - Parker TX, US
Edward Fisher - Lucas TX, US
Joyce Holton - Plano TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

G02B 26/00

US Classification:

359291000

Abstract:

One embodiment provides an anchor to hold getter materials in place within a micromechanical device package substrate, said anchor comprising: a first cavity face; and a second cavity face. The cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. Another embodiment provides an anchor to hold a getter in place within a micromechanical device package. The anchor comprises: a package substrate; and a member attached to the package substrate, the member shaped to provide mechanical retention of the getter material formed over said member. Another embodiment provides a micromechanical device package comprising: a package substrate; a package lid enclosing a package cavity; a micromechanical device in the package cavity; and a getter anchor in the package cavity. Other embodiments provide methods of packaging and forming packages having a getter anchor. One getter anchor is formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion—formed in the middle layer and a relatively narrower top portion—formed by the top layer . The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity. The preceding abstract is submitted with the understanding that it will only be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosures as described in 37 C.F.R. 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

US Patent:

52665275, Nov 30, 1993

Filed:

Sep 17, 1991

Appl. No.:

7/761202

Inventors:

Roger A. Robbins - Allen TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H01L 2100
H01L 2102
H01L 21302
H01L 21463

US Classification:

437225

Abstract:

A method of processing a semiconductor wafer using a wafer chuck having a first end with a non-planar surface, the non-planar surface shaped such that a wafer supported at a plurality of points about its periphery will have a uniform pressure between its surface and the non-planar surface, and pressing a surface of the wafer against the non-planar surface of the wafer chuck.

US Patent:

54239427, Jun 13, 1995

Filed:

Jun 20, 1994

Appl. No.:

8/262800

Inventors:

Roger A. Robbins - Allen TX
Donald E. Brown - Bedford TX
David W. Buck - Mesquite TX
Alan D. Rose - Wylie TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H05H 100

US Classification:

1566431

Abstract:

A method and apparatus is provided for reducing wall erosion in a plasma containment tube (20), such as, for example, a quartz plasma tube (20) used in a microwave-induced plasma reaction process for etching semiconductor wafers. A pure benign or non-corrosive gas (Ar) is introduced into the "upstream" section (22a) of the tube (22), where the microwave energy is imparted to create a plasma. The activated benign gas flows "downstream" through a flange (28), preferably made of quartz, which is seated on o-rings (50) inside a water-cooled metal flange (48). These sealing o-rings (50) are thus cooled and removed from the ultraviolet light created by the plasma. The corrosive etchant gas (SF. sub. 6) is introduced into the "downstream" section (22b) of the tube (22) beyond the flange (28), where it is activated by the benign gas (Ar). The benign gas (Ar) flows principally along the inner sidewalls of the tube (22), and the etchant gas (SF. sub.