Ronald A Inman

US Patent:

6421127, Jul 16, 2002

Filed:

Jul 11, 2000

Appl. No.:

09/613806

Inventors:

James J. F. McAndrew - Lockport IL
Benjamin Jurcik - St. Remy les Chevreuse, FR
Carol Schnepper - Tulsa OK
Ronald Inman - Lyons IL
Dmitry Znamensky - Darien IL
Tracey Jacksier - Lisle IL

Assignee:

American Air Liquide, Inc. - Fremont CA

International Classification:

G01N 2103

US Classification:

356437, 356440, 356246, 359509, 359512

Abstract:

Provided are novel methods of preventing deposition on an optical component in an absorption spectroscopy measurement cell. The methods involve performing an absorption spectroscopy measurement of a sample gas introduced into the cell, and introducing a flow of purge gas from a purge gas inlet pipe across a critical surface of the optical element at a velocity effective to prevent deposition on the critical surface. The gas inlet is disposed adjacent said critical surface. Also provided are devices for practicing the inventive method, measurement cells useful in absorption spectroscopy measurements, apparatuses for performing an absorption spectroscopy measurement and semiconductor processing apparatuses. The invention allows for the performance of accurate spectroscopic measurements. Because deposits are prevented from forming on the surface of an optical element, interference therefrom can effectively be avoided.

US Patent:

7141500, Nov 28, 2006

Filed:

May 13, 2004

Appl. No.:

10/844579

Inventors:

Gregory M. Jursich - Clarendon Hills IL, US
Ronald S. Inman - Lyons IL, US

Assignee:

American Air Liquide, Inc. - Fremont CA

International Classification:

H01L 21/44

US Classification:

438688, 438197, 438381, 257E2128, 257E21269, 257E21292

Abstract:

A method of forming an aluminum containing film on a substrate includes providing a precursor having the chemical structure: Al(NRR)(NRR)(NRR); where each of R, R, R, R, Rand Ris independently selected from the group consisting of hydrogen and an alkyl group including at least two carbon atoms. The precursor is utilized to form a film on the substrate including at least one of aluminum oxide, aluminum nitride and aluminum oxy-nitride. Each of the R–Rgroups can be the same or different and can by straight or branched chain alkyls. An exemplary precursor that has is useful in forming aluminum containing films is tris diethylamino aluminum.

US Patent:

7312165, Dec 25, 2007

Filed:

May 5, 2005

Appl. No.:

11/124451

Inventors:

Gregory M. Jursich - Clarendon Hills IL, US
Ronald S. Inman - Lyons IL, US

International Classification:

H01L 31/31

US Classification:

438785, 438685, 438761, 438778, 438780, 438783, 438790, 257E21274

Abstract:

Methods of film deposition using metals and metal oxides. A thin film of germanium oxide and an oxide of a non-germanium metal is deposited by ALD by alternating deposition of first and second precursor compounds, wherein the first precursor compound includes a metal other than germanium, and the second precursor compound includes germanium.

US Patent:

20090090164, Apr 9, 2009

Filed:

Oct 31, 2007

Appl. No.:

11/932635

Inventors:

Ronald S. INMAN - Brookfield IL, US

Assignee:

Air Liquide Electronics U.S. LP - Houston TX

International Classification:

G01F 25/00

US Classification:

73 125

Abstract:

Methods and apparatus for determining if it is necessary to calibrate a liquid flow controller which is contained in a liquid distribution system, where the liquid distribution system supplies a fluid to a semiconductor processing tool. The determination is made while maintaining system as closed, such that fluid does not need to be removed from the liquid distribution system.

US Patent:

61884758, Feb 13, 2001

Filed:

Sep 2, 1999

Appl. No.:

9/389103

Inventors:

Ronald S. Inman - Lyons IL
James J. F. McAndrew - Lockport IL

Assignee:

American Air Liquide, Inc. - Walnut Creek CA

International Classification:

G01N 110

US Classification:

356246

Abstract:

Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.

US Patent:

58808507, Mar 9, 1999

Filed:

Oct 16, 1997

Appl. No.:

8/951301

Inventors:

James McAndrew - Lockport IL
Ronald S. Inman - Lyons IL

Assignee:

American Air Liquide Inc - Walnut Creek CA

International Classification:

G01N 2100

US Classification:

356437

Abstract:

Provided is a novel method and system for harmonic detection spectroscopy. The method comprises providing a cell having a sample region which is circumscribed by at least one wall. The cell has at least one light entry/exit port, with each entry/exit port containing a light transmissive window having a surface facing the sample region and disposed so as to seal the cell in the circumferential direction. A sample gas flows through the sample region in a direction parallel to a cell central axis, and the cell operates at less than atmospheric pressure. A frequency and/or amplitude modulated light source is provided for directing a light beam through one of the at least one light transmissive windows into the cell. The light source modulation amplitude is set to a value which approximately maximizes the value of a harmonic signal at the center of the absorption feature due to the detected gas phase molecular species inside the sample region, and the center frequency of the light source is adjusted so that it is either locked to the center of the absorption feature or repetitively scanned over the frequency range which includes the feature. A spectra is then generated which may be recorded individually or averaged.

US Patent:

58185780, Oct 6, 1998

Filed:

Sep 10, 1996

Appl. No.:

8/711504

Inventors:

Ronald S. Inman - Lyons IL
James McAndrew - Lockport IL

Assignee:

American Air Liquide Inc. - Walnut Creek CA

International Classification:

G01N 110

US Classification:

356246

Abstract:

Provided is a novel polygonal planar multipass cell and method of use for absorption spectroscopy. The cell comprises a sample region circumscribed by a plurality of walls. Each wall has a light reflective surface facing the sample region, and each wall is connected to at least one other wall so as to form in cross section substantially a polygon. At least one side of the polygon has a light entry/exit port therein, and the entry/exit port contains a light transmissive window which has a surface facing the sample region. The window is disposed so as to seal the cell in the circumferential direction. The cell has a central axis parallel to the light reflective surfaces of the walls and the surface of the light transmissive window which face the sample region. The cell can be used to measure molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.

US Patent:

60846682, Jul 4, 2000

Filed:

Jul 13, 1998

Appl. No.:

9/114760

Inventors:

James J.F. McAndrew - Lockport IL
Ronald S. Inman - Lyons IL

Assignee:

American Air Liquide Inc. - Walnut Creek CA

International Classification:

G01N 110

US Classification:

356246

Abstract:

Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light transmissive window in the light entry port and/or said light exit port is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor manufacturing in a semiconductor processing tool.