Ronald D Inman

US Patent:

20090034361, Feb 5, 2009

Filed:

May 13, 2008

Appl. No.:

12/119869

Inventors:

Duy K. TRANG - San Jose CA, US
Matthieu E. Peterschmitt - San Jose CA, US
Raul A. Martin - San Jose CA, US
M. Usman Ghani - Naperville IL, US
Jian Wang - Newark DE, US
Jeffrey E. Lorelli - Fremont CA, US
Axel Soulet - Oakland CA, US
Christophe Colin - Union City CA, US
Ronald S. Inman - Brookfield IL, US

International Classification:

B01F 15/02
B01F 15/04

US Classification:

3661521, 3661671, 3661651

Abstract:

Methods and fluid delivery systems mix fluids together. A blender of the system receives and blends at least two chemical compounds together for delivery to one or more vessels, tanks or process tools, such as chemical baths that facilitate processing (e.g., cleaning) of semiconductor wafers or other components. A first fluid enters into a bore of a mixing chamber of the blender through an aperture in a wall of the chamber to enable blending of the first fluid with a second fluid injected into a central region of the bore.