James J. F. McAndrew - Lockport IL Benjamin Jurcik - St. Remy les Chevreuse, FR Carol Schnepper - Tulsa OK Ronald Inman - Lyons IL Dmitry Znamensky - Darien IL Tracey Jacksier - Lisle IL
Assignee:
American Air Liquide, Inc. - Fremont CA
International Classification:
G01N 2103
US Classification:
356437, 356440, 356246, 359509, 359512
Abstract:
Provided are novel methods of preventing deposition on an optical component in an absorption spectroscopy measurement cell. The methods involve performing an absorption spectroscopy measurement of a sample gas introduced into the cell, and introducing a flow of purge gas from a purge gas inlet pipe across a critical surface of the optical element at a velocity effective to prevent deposition on the critical surface. The gas inlet is disposed adjacent said critical surface. Also provided are devices for practicing the inventive method, measurement cells useful in absorption spectroscopy measurements, apparatuses for performing an absorption spectroscopy measurement and semiconductor processing apparatuses. The invention allows for the performance of accurate spectroscopic measurements. Because deposits are prevented from forming on the surface of an optical element, interference therefrom can effectively be avoided.
Methods For Forming Aluminum Containing Films Utilizing Amino Aluminum Precursors
A method of forming an aluminum containing film on a substrate includes providing a precursor having the chemical structure: Al(NRR)(NRR)(NRR); where each of R, R, R, R, Rand Ris independently selected from the group consisting of hydrogen and an alkyl group including at least two carbon atoms. The precursor is utilized to form a film on the substrate including at least one of aluminum oxide, aluminum nitride and aluminum oxy-nitride. Each of the R–Rgroups can be the same or different and can by straight or branched chain alkyls. An exemplary precursor that has is useful in forming aluminum containing films is tris diethylamino aluminum.
Codeposition Of Hafnium-Germanium Oxides On Substrates Used In Or For Semiconductor Devices
Methods of film deposition using metals and metal oxides. A thin film of germanium oxide and an oxide of a non-germanium metal is deposited by ALD by alternating deposition of first and second precursor compounds, wherein the first precursor compound includes a metal other than germanium, and the second precursor compound includes germanium.
Methods For Checking And Calibrating Concentration Sensors In A Semiconductor Processing Chamber
Francois Doniat - Wilmington DE, US Ronald S. Inman - Brookfield IL, US Nathan Stafford - Wilmington DE, US Axel Soulet - Berkeley CA, US Jean-Louis Marc - La Redorte, FR
Assignee:
Air Liquide Electronics U.S. LP - Dallas TX American Air Liquide, Inc. - Fremont CA
International Classification:
G01N 21/00
US Classification:
73 103
Abstract:
The present invention provides methods for checking and calibrating one or more concentration sensors in an open or closed system. More specifically, in one embodiment of the present invention, the disclosed method allows for the checking and calibration of one or more concentration sensors in which removal of the liquid from the system is required. In two additional embodiments, the disclosed methods allow for the checking and calibration of one or more concentration sensors without having to remove the liquid from the closed system thereby minimizing contamination of the system while at the same time greatly reducing or eliminating contact of the user with the liquid.
Duy K. TRANG - San Jose CA, US Matthieu E. Peterschmitt - San Jose CA, US Raul A. Martin - San Jose CA, US M. Usman Ghani - Naperville IL, US Jian Wang - Newark DE, US Jeffrey E. Lorelli - Fremont CA, US Axel Soulet - Oakland CA, US Christophe Colin - Union City CA, US Ronald S. Inman - Brookfield IL, US
International Classification:
B01F 15/02 B01F 15/04
US Classification:
3661521, 3661671, 3661651
Abstract:
Methods and fluid delivery systems mix fluids together. A blender of the system receives and blends at least two chemical compounds together for delivery to one or more vessels, tanks or process tools, such as chemical baths that facilitate processing (e.g., cleaning) of semiconductor wafers or other components. A first fluid enters into a bore of a mixing chamber of the blender through an aperture in a wall of the chamber to enable blending of the first fluid with a second fluid injected into a central region of the bore.
Method For Volumetrically Calibrating A Liquid Flow Controller While Maintaining The Liquid In A Closed System
Methods and apparatus for determining if it is necessary to calibrate a liquid flow controller which is contained in a liquid distribution system, where the liquid distribution system supplies a fluid to a semiconductor processing tool. The determination is made while maintaining system as closed, such that fluid does not need to be removed from the liquid distribution system.
Ronald S. Inman - Lyons IL James J. F. McAndrew - Lockport IL
Assignee:
American Air Liquide, Inc. - Walnut Creek CA
International Classification:
G01N 110
US Classification:
356246
Abstract:
Provided is a novel in-line cell useful in absorption spectroscopy. The cell includes a sample region, a light entry port and a light exit port being the same or separate ports. Each port is in communication with the sample region and contains a light transmissive window. A mirror having a light reflective surface faces the sample region, and a heater effective to heat the light reflective surface is provided. The cell can be used to determine the concentration of molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.
Method And System For Sensitive Detection Of Molecular Species In A Vacuum By Harmonic Detection Spectroscopy
James McAndrew - Lockport IL Ronald S. Inman - Lyons IL
Assignee:
American Air Liquide Inc - Walnut Creek CA
International Classification:
G01N 2100
US Classification:
356437
Abstract:
Provided is a novel method and system for harmonic detection spectroscopy. The method comprises providing a cell having a sample region which is circumscribed by at least one wall. The cell has at least one light entry/exit port, with each entry/exit port containing a light transmissive window having a surface facing the sample region and disposed so as to seal the cell in the circumferential direction. A sample gas flows through the sample region in a direction parallel to a cell central axis, and the cell operates at less than atmospheric pressure. A frequency and/or amplitude modulated light source is provided for directing a light beam through one of the at least one light transmissive windows into the cell. The light source modulation amplitude is set to a value which approximately maximizes the value of a harmonic signal at the center of the absorption feature due to the detected gas phase molecular species inside the sample region, and the center frequency of the light source is adjusted so that it is either locked to the center of the absorption feature or repetitively scanned over the frequency range which includes the feature. A spectra is then generated which may be recorded individually or averaged.
Anson Jones Elementary School Baytown TX 1966-1970
Community:
Cherri Munoz, Collis Redd, Kathryn Pittman, Alfred Waldrep, Linda Webb, Lera Schrock, Sarah Powell, Ronald Inman, Luetta Smith, Hazel Carnes, Cherri Johnson
Anson Jones Elementary School Baytown TX 1935-1939
Community:
Cherri Munoz, Collis Redd, Kathryn Pittman, Alfred Waldrep, Ronald Inman, Linda Webb, Lera Schrock, Sarah Powell, Sharon Arrowsmith, Luetta Smith, Hazel Carnes, Cherri Johnson