Ronald R Rose

US Patent:

6379466, Apr 30, 2002

Filed:

May 5, 1994

Appl. No.:

08/238598

Inventors:

Turgut Sahin - Cupertino CA
Salvador Umotoy - Antioch CA
Avi Tepman - Cupertino CA
Ronald Lloyd Rose - Los Gatos CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118724, 118715, 20429809, 165168, 165169, 165 804

Abstract:

The temperature controlled gas distribution plate of the present invention includes a liquid cooling passage, with inlet and outlet ports, that is formed within the gas distribution plate. In the preferred embodiment, the plate is formed with an upper passage cover and a lower base having a liquid passage channel formed within the side walls thereof. The cover and base are welded together to form a sealed liquid passage within the plate through which the liquid coolant flows.

US Patent:

7897525, Mar 1, 2011

Filed:

Dec 31, 2008

Appl. No.:

12/319231

Inventors:

Lawrence Chung-Lai Lei - Milpitas CA, US
Alfred Mak - Fremont CA, US
Rex Liu - Castro Valley CA, US
Kon Park - Livermore CA, US
Samuel S. Pak - San Ramon CA, US
Tzy-Chung Terry Wu - Palo Alto CA, US
Simon Zhu - Sunnyvale CA, US
Ronald L. Rose - San Jose CA, US
Gene Shin - San Jose CA, US
Xiaoming Wang - San Jose CA, US

Assignee:

Archers Inc. - Gerogetown, Grand Cayman

International Classification:

H01L 21/00

US Classification:

438800, 414935

Abstract:

In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

US Patent:

8268734, Sep 18, 2012

Filed:

Mar 1, 2011

Appl. No.:

13/038309

Inventors:

Lawrence Chung-Lai Lei - Milpitas CA, US
Alfred Mak - Fremont CA, US
Rex Liu - Castro Valley CA, US
Kon Park - Livermore CA, US
Samuel S. Pak - San Ramon CA, US
Tzy-Chung Terry Wu - Palo Alto CA, US
Simon Zhu - Sunnyvale CA, US
Ronald L. Rose - San Jose CA, US
Gene Shin - San Jose CA, US
Xiaoming Wang - San Jose CA, US

Assignee:

Archers Inc. - Georgetown

International Classification:

H01L 21/00

US Classification:

438800, 414935

Abstract:

In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

US Patent:

8367565, Feb 5, 2013

Filed:

Dec 20, 2010

Appl. No.:

12/973736

Inventors:

Lawrence Chung-Lai Lei - Milpitas CA, US
Alfred Mak - Fremont CA, US
Rex Liu - Castro Valley CA, US
Kon Park - Livermore CA, US
Samuel S. Pak - San Ramon CA, US
Tzy-Chung Terry Wu - Palo Alto CA, US
Simon Zhu - Sunnyvale CA, US
Ronald L. Rose - San Jose CA, US
Gene Shin - San Jose CA, US
Xiaoming Wang - San Jose CA, US

Assignee:

Archers Inc. - Georgetown

International Classification:

H01L 21/00

US Classification:

438800, 414935

Abstract:

In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.

US Patent:

8539428, Sep 17, 2013

Filed:

Mar 22, 2012

Appl. No.:

13/427516

Inventors:

David J. Widiger - Pflugerville TX, US
Ronald D. Rose - Essex Junction VT, US
Sandy K. Kao - Austin TX, US
Gerald F. Plumb - Round Rock TX, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 17/50

US Classification:

716136, 716105, 716126, 716139

Abstract:

The present disclosure is directed to a method for extracting information for a circuit design. The method may utilize an incremental extraction process for extracting information for a portion of the circuit design. Extracted results of this portion may be merged with a previously extracted result to obtain an integrated result that is equivalent to that of extracting the entire circuit design. The incremental extraction process may identify a set of changed shapes, a set of affected shapes, and a set of involved shapes for extraction. The method may also divide the circuit design into a plurality of regions, wherein two or more regions may be processed in parallel.

US Patent:

8612918, Dec 17, 2013

Filed:

Mar 22, 2012

Appl. No.:

13/427486

Inventors:

David J. Widiger - Pflugerville TX, US
Ronald D. Rose - Essex Junction VT, US
Sandy K Kao - Austin TX, US
Gerald F Plumb - Round Rock TX, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 17/50

US Classification:

716132, 716111, 716112, 716115

Abstract:

The present disclosure is directed to a method for extracting information for a circuit design. The method includes establishing a reflexive relationship between a plurality of design shapes corresponding to a plurality of circuit components in the circuit design. The method includes receiving a design change for at least one design shape of the plurality of design shapes. The method includes identifying a set of changed shapes, a set of affected shapes, and a set of involved shapes. The method includes extracting at least one of a capacitance, an inductance or a resistance for the updated circuit design based on at least one of the set of changed shapes, the set of affected shapes and the set of involved shapes. The method includes updating the plurality of circuit components in the circuit design based on at least one of the set of changed shapes and the set of affected shapes.

US Patent:

8640062, Jan 28, 2014

Filed:

Jun 10, 2011

Appl. No.:

13/157980

Inventors:

Kanak B. Agarwal - Austin TX, US
Sani R. Nassif - Austin TX, US
Ronald D. Rose - Essex Junction VT, US
Chenggang Xu - Austin TX, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 17/50

US Classification:

716103, 716106, 716108, 716109, 716132, 716133, 716134

Abstract:

A mechanism is provided for rapid estimation of temperature rise in wires due to Joule heating. The mechanism provides fast and accurate estimation of temperature rise in wires due to self heating. Fast estimation is important to handle millions of nets at the full-chip level. The mechanism models lateral heat flow by considering longitudinal heat flow along the wire and lateral thermal coupling to the other wires in the same level. Lateral heat flow can have a significant effect on the temperature rise. The mechanism also models vertical heat flow to the substrate and the heat sink by considering thermal conductivities of vias and inter-layer dielectric (ILD). The mechanism efficiently solves the thermal system to enable physical design optimizations (e. g. , wire sizing, etc. ) for fixing electromigration violations.

US Patent:

8645899, Feb 4, 2014

Filed:

Mar 31, 2009

Appl. No.:

12/415266

Inventors:

David J. Widiger - Pflugerville TX, US
Ronald D. Rose - Essex Junction VT, US
Sandy K. Kao - Austin TX, US
Gerald F. Plumb - Round Rock TX, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06F 17/50

US Classification:

716139, 716104, 716105

Abstract:

The present disclosure is directed to a method for extracting information for a circuit design. The method may utilize an incremental extraction process for extracting information for a portion of the circuit design. Extracted results of this portion may be merged with a previously extracted result to obtain an integrated result that is equivalent to that of extracting the entire circuit design. The incremental extraction process may identify a set of changed shapes, a set of affected shapes, and a set of involved shapes for extraction. The method may also divide the circuit design into a plurality of regions, wherein two or more regions may be processed in parallel.