Ronald W Swanson

US Patent:

20190112711, Apr 18, 2019

Filed:

Mar 24, 2017

Appl. No.:

16/090516

Inventors:

- St. Paul MN, US
Bill H. Dodge - Finlayson MN, US
Joseph C. Spagnola - Woodbury MN, US
Glen A. Jerry - Blaine MN, US
Ameeta R. Goyal - Woodbury MN, US
Ronald P. Swanson - Woodbury MN, US
James N. Dobbs - Woodbury MN, US

International Classification:

C23C 16/54
C23C 16/455
C23C 16/02

Abstract:

A method is provided. The method may include engaging a first edge region on a first surface of a substrate with a first support roller; engaging a second edge region on the first surface of the substrate with a second support roller; transporting the substrate over the first and the second support rollers; repeating the following sequence of steps to form a thin film on the substrate: (a) exposing the substrate to a first precursor; (b) supplying a reactive species to the substrate after exposing the substrate to the first precursor; and depositing a vapor on the thin film to form a coating on the thin film.