Ruben P Rodriguez

US Patent:

53024770, Apr 12, 1994

Filed:

Aug 21, 1992

Appl. No.:

7/933400

Inventors:

Giang T. Dao - Fremont CA
Ruben A. Rodriguez - Fremont CA
Harry H. Fujimoto - Sunnyvale CA

Assignee:

Intel Corporation - Santa Clara CA

International Classification:

G03F 900

US Classification:

430 5

Abstract:

A phase-shifted reticle with patterns proximate each other having inverted phases for the features and phase-shifting elements, and methods of fabricating the reticle, are disclosed. In a preferred embodiment, the inverted reticle is used to form an array of closely spaced contact or via openings. For a first pattern on the reticle, the feature will be the 0. degree. phase and the phase-shifting rim surrounding that feature will be the 180. degree. phase. All patterns surrounding the first pattern have phase-shifting rims of the 0. degree. phase and features of the 180. degree. phase. In this way, each pattern can form below conventional resolution features in the resist. Additionally, there will not be exposure of the regions between the closely spaced features since radiation transmitted through the closely spaced phase-shifting rims of the two patterns is 180. degree. out of phase.

US Patent:

20210163621, Jun 3, 2021

Filed:

Apr 10, 2019

Appl. No.:

17/046731

Inventors:

- Thousand Oaks CA, US
- Santa Monica CA, US
Christopher MURAWSKY - Roberts Creek, British Columbia, CA
Ryan B. CASE - Alameda CA, US
Lawren WU - Foster City CA, US
Jed J. WILTZIUS - Winchester MA, US
Ruben Alvarez RODRIGUEZ - Los Angeles CA, US
Jun FENG - Los Angeles CA, US

Assignee:

AMGEN INC. - Thousand Oaks CA
KiTe Pharma, Inc. - Santa Monica CA

International Classification:

C07K 16/30
A61P 35/00
C12N 15/86
C07K 14/705

Abstract:

Antigen binding molecules, chimeric receptors, and engineered immune cells to DLL3 are disclosed in accordance with the invention. The invention further relates to vectors, compositions, and methods of treatment and/or detection using the DLL3 antigen binding molecules and engineered immune cells.