Russell C Kidd

US Patent:

20050241579, Nov 3, 2005

Filed:

Apr 30, 2004

Appl. No.:

10/837545

Inventors:

Russell Kidd - Hayward CA, US

International Classification:

C23C016/00

US Classification:

118715000, 427248100

Abstract:

A gas delivery assembly for uniform gas flow within a processing system is provided. In one aspect, a gas delivery assembly includes sidewalls at least partially disposed about a gas delivery component disposed within the processing system. The gas delivery shield also includes a bottom wall having a varied profile that extends beyond the gas delivery component to define a varied spacing above the substrate. The bottom wall of the gas delivery also includes a plurality of gas passageways formed therethrough to deliver a uniform gas distribution to a substrate being processed.