Sam Lee

US Patent:

7413992, Aug 19, 2008

Filed:

May 23, 2006

Appl. No.:

11/440163

Inventors:

Sok Kiow Tan - Newark CA, US
Shenjian Liu - Fremont CA, US
Harmeet Singh - Fremont CA, US
Sam Do Lee - Fremont CA, US
Linda Fung-Ming Lee - Redwood City CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

H01L 21/302

US Classification:

438706, 438659, 438714, 438719, 438738, 216 60, 216 79, 156345

Abstract:

The embodiments provides an improved tungsten silicide etching process with reduced etch rate micro-loading effect. In one embodiment, a method for etching a layer formed on a substrate is provided. The method includes providing a substrate into a plasma processing chamber, the substrate having a metal silicide layer formed thereon and a patterned mask defined over the metal silicide layer. The method also includes supplying an etching gas mixture of a fluorine-containing gas, a chlorine-containing gas, a nitrogen-containing gas, and an oxygen-containing gas to the plasma processing chamber, wherein the ratio of the nitrogen-containing gas to the fluorine-containing gas is between about 5 to about 15. In addition, the method includes generating a plasma in the plasma processing chamber using the supplied etching gas mixture to etch the metal silicide layer in regions not covered by the patterned mask, the patterned mask defining dense regions and isolated regions, wherein the generated plasma is configured to remove the metal silicide layer in the dense regions and the isolated regions at a reduced etch rate micro-loading.

US Patent:

7899783, Mar 1, 2011

Filed:

May 30, 2006

Appl. No.:

11/421049

Inventors:

Yi-Le Gloria Xu - Cupertino CA, US
Sam Chi Lee - San Jose CA, US
Shmuel Shaffer - Palo Alto CA, US

Assignee:

Cisco Technology, Inc - San Jose CA

International Classification:

G06F 7/00
G06F 17/00
G06F 15/167

US Classification:

707613, 709213

Abstract:

A method and system are described for reporting on data integrity in a data repository which is configured for synchronization with at least one other data repository. The method comprises interrogating metadata associated with the data repository to establish a latest two consecutive synchronization times at which no updates were processed. The method further comprises automatically generating an indication message to provide an indication of the data integrity at the latest of the synchronization times.

US Patent:

20110022388, Jan 27, 2011

Filed:

Jul 27, 2009

Appl. No.:

12/509797

Inventors:

Sung Fong Solomon WU - Sunnyvale CA, US
Aaron TONG - San Jose CA, US
Sam C. LEE - San Jose CA, US

International Classification:

G10L 15/00

US Classification:

704246, 704E15001

Abstract:

In an example embodiment, there is disclosed an apparatus comprising an audio interface configured to receive an audio signal, a data interface is configured to communicate with at least one social graph, and logic is coupled to the audio interface and the data interface. The logic is configured to identify a calling party. The logic is further configured to acquire data representative of a called party from the audio signal. The logic is configured to initiate a search of the at least one social graph for the data representative of the called party to identify the called party responsive to acquiring the data representative of the called party.

US Patent:

20120084172, Apr 5, 2012

Filed:

Oct 1, 2010

Appl. No.:

12/896776

Inventors:

Sam H. Lee - Menlo Park CA, US
Erik C. Smith - Menlo Park CA, US

Assignee:

Alta Energy, Inc. - Menlo Park CA

International Classification:

G06Q 30/00

US Classification:

705 263, 705 261

Abstract:

Disclosed herein are methods and systems for operating an exchange service for renewable energy resources. In one embodiment, an exchange service, implemented on an exchange entity server, receives inputs from property entities related to assets available for installation of a renewable energy setup. The exchange server places this asset in a marketplace, allowing other provider entities to place a bid for installing the renewable energy setup at a location associated with the asset. Examples of the provider entities include a developer entity, a manufacturer entity, a financier entity, etc. In embodiments, the marketplace enables interaction among the provider entities to enable the provider entities to develop and place a composite bid for a selected asset available through the marketplace.

US Patent:

60965029, Aug 1, 2000

Filed:

Mar 30, 1998

Appl. No.:

9/050559

Inventors:

Sam S.-K. Lee - Campbell CA

International Classification:

C12Q 168
C12Q 170
C07H 1900
C07H 2102

US Classification:

435 6

Abstract:

A UL9 substrate for detecting helicase activity in a UL9 protein is provided. In one embodiment, the substrate includes a first strand including a herpes replication origin sequence and a first single stranded tail; and a second strand including a sequence complementary to the herpes replication origin sequence. In one variation, the first single stranded tail is 3' relative to the herpes replication origin sequence. The second strand may optionally further include a single stranded tail. The single stranded tail on the second strand may be 3' or 5' relative to the sequence complementary to the herpes replication origin sequence. In another variation, the first single stranded tail is 5' relative to the herpes replication origin sequence. The second strand may optionally further include a single stranded tail. The single stranded tail on the second strand may be 3' or 5' relative to the sequence complementary to the herpes replication origin sequence.

US Patent:

46926348, Sep 8, 1987

Filed:

Apr 28, 1986

Appl. No.:

6/856920

Inventors:

Sheng Fang - Milpitas CA
Sam H. Lee - Campbell CA

Assignee:

Advanced Micro Devices, Inc. - Sunnyvale CA

International Classification:

H03K 3356
G11C 1140

US Classification:

3072721

Abstract:

A CMOS data register includes a master stage and a slave stage. The master stage is formed of first transfer gates and first storage devices. The slave stage is formed of second transfer gates, second storage devices and third transfer gates. The transfer gates and storage devices are formed of MOS transistors of one conductivity which decreases layout complexity and reduces the amount of chip area required. The data register is formed of a fewer number of transistor components, thereby reducing the loading on the clock signals.

US Patent:

20210407811, Dec 30, 2021

Filed:

Nov 29, 2018

Appl. No.:

16/766256

Inventors:

- Fremont CA, US
Zhongkui TAN - Fremont CA, US
Qian FU - Pleasanton CA, US
Sam Do LEE - Newark CA, US

International Classification:

H01L 21/3065
H01L 21/311

Abstract:

A method for forming a stair-step structure in a stack on a substrate is provided. The method comprises at least one stair step cycle. Each stair step cycle comprises trimming the mask and etching the stack. Etching the stack is provided in a plurality of cycles wherein each cycle comprises etching a SiOlayer and etching a SiN layer. Etching a SiOlayer comprises flowing a SiOetching gas into the plasma processing chamber, wherein the SiOetching gas comprises a hydrofluorocarbon, an inert bombardment gas, and at least one of SFand NF, generating a plasma from the SiOetching gas, providing a bias, and stopping the SiOlayer etch. The etching a SiN layer comprises flowing a SiN etching gas into the plasma processing chamber, comprising a hydrofluorocarbon and oxygen, generating a plasma from the SiN etching gas, providing a bias, and stopping the SiN layer etch.

US Patent:

20190008096, Jan 10, 2019

Filed:

Sep 25, 2017

Appl. No.:

15/715111

Inventors:

- Portola Valley CA, US
Sam Lee - Portola Valley CA, US

International Classification:

A01G 7/04
H05B 33/08

Abstract:

Disclosed is a spectral deficiency-driven control system in a plant growth automation, the system comprising: a facilities resource management system; a processor; a memory element coupled to the processor; encoded instructions; wherein the system is further configured to: over a network, receive at least one of a facility systems data; based on the received facility systems data, control an action via the facilities resource management system; wherein the received facility systems data is gathered via at least one facility sensor configured to detect facility-incoming and, or facility-generated light spectra and a sensor manager for determining a deficiency in light spectra; and wherein the actions controlled by the facilities resource management system is augmenting at least one of a spectral output of at least one light-emitting diode (LED) channel from at least one LED light source; light brightness; and, or a light height adjustment, based on the spectral deficiency.