Sam Wing Wong

US Patent:

54337178, Jul 18, 1995

Filed:

Mar 23, 1993

Appl. No.:

8/035455

Inventors:

Boris Rubinsky - Albany CA
John Gilbert - Berkeley CA
Sam Wong - Emeryville CA
Mark Roos - San Francisco CA
Grant Pease - Oakland CA

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

A61B 1736

US Classification:

606 20

Abstract:

Methods and apparatus for magnetic resonance imaging (MRI) assisted cryosurgery. Optimal probe placements and cooling parameters are calculated prior to cryosurgery using MRI data. A MRI compatible cryoprobe and a stereotactic probe positioning device are provided. The resolution of MR images is enhanced by mounting a radio frequency MR coil on the intracorporeal end of a cryoprobe. During cryosurgery the temperature distribution in the frozen region is solved by determining the boundary of the frozen region and solving the heat equation for the known boundary conditions. During cryosurgery the temperature distribution in the unfrozen region is determined by T1 measurements. The process of freezing is controled using information from the solution of the energy equation in the frozen region and temperature measurements in the unfrozen region. After cryosurgery the extent of the tissue damage may be ascertained using phosphorus-31 and/or sodium-23 spectroscopy with a special coil set on the cryosurgical probe.

US Patent:

55023061, Mar 26, 1996

Filed:

Mar 17, 1994

Appl. No.:

8/214377

Inventors:

Dan Meisburger - San Jose CA
Alan D. Brodie - Palo Alto CA
Curt Chadwick - Los Gatos CA
Anil Desai - San Jose CA
Hans Dohse - Pleasanton CA
Dennis Emge - San Jose CA
John Greene - Los Altos CA
Ralph Johnson - Los Gatos CA
John McMurtry - Menlo Park CA
Barry Becker - San Jose CA
Ray Paul - Palo Alto CA
Mike Robinson - San Jose CA
Richard Simmons - Los Altos CA
David E. A. Smith - San Mateo CA
John Taylor - San Jose CA
Lee Veneklasen - Castro Valley CA
Dean Walters - Napierville IL
Paul Wieczorek - San Jose CA
Sam Wong - San Jose CA
April Dutta - Milpitas CA
Surendra Lele - Santa Clara CA
Kirkwood Rough - San Jose CA
Henry Pearce-Percy - Los Gatos CA
Jack Y. Jau - Fremont CA
Chun C. Lin - Cupertino CA
Hoi T. Nguyen - Milpitas CA
Yen-Jen Oyang - Cupertino CA
Timothy L. Hutcheson - Los Gatos CA
David J. Clark - Atherton CA
Chung-Shih Pan - Palo Alto CA
Chetana Bhaskar - San Jose CA
Chris Kirk - Beconsfield Bucks, GB2
Eric Munro - London, GB2

Assignee:

KLA Instruments Corporation - San Jose CA

International Classification:

H01J 3726

US Classification:

250310

Abstract:

There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least one of the secondary particles, back-scattered particles and transmitted particles from the substrate. The substrate is mounted on an x-y stage to provide it with at least one degree of freedom while the substrate is being scanned by the/particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary particles. The system also has the capability to accurately measure the position of the substrate with respect to the charged particle beam. Additionally, there is an optical alignment means for initially aligning the substrate beneath the,particle beam means. To function most efficiently there is also a vacuum means for evacuating and repressurizing a chamber containing the substrate.