Witawat Wijaranakula - Vancouver WA Sandra A. Archer - Portland OR Dinesh C. Gupta - Vancouver WA
Assignee:
Seh America, Inc. - Vancouver WA
International Classification:
H01L 21324
US Classification:
438502
Abstract:
A monitor wafer used to determine the cleanliness of a wafer fabrication environment requires a surface having a minimum of light scattering anomalies so that contamination deposited by the environment is not confused with light scattering anomalies initially on the monitor wafers. In the present invention, ingots of a single-crystal semiconductor are grown at a reduced pull rate and wafers produced from the ingot are annealed within a preferred temperature range that varies with the pull rate to produce wafers having reduced light-scattering anomalies on their surfaces. The number of light-scattering anomalies increases at a slower rate upon repetitive cleaning cycles than does the number of light-scattering anomalies of prior art wafers.
Dr. Archer graduated from the University of Kansas School of Medicine in 2002. She works in Lenexa, KS and specializes in Family Medicine. Dr. Archer is affiliated with Shawnee Mission Medical Center Inc.
Mt. St. Mary's High School Oklahoma City OK 1960-1964
Community:
Deborah Zurline, Margaret Ortiz, Alice Weger, John Smith, Diana Lapach, Carol Smith, Libby Johnson, Linda Storozyszyn, Christine Smith, Martha Stone, Judy Mesa
Native born Texan in the far west Texas city of El Paso. I was born at home child into a family of very loving parents and brothers and sisters and two very loving Grandparents, Jesus & Josefina O...
Bragging Rights:
Single Mother with three grown children and eight grandchildren and one awesome horse-Ruben.