Joseph F. Sommers - San Jose CA, US Jiansheng Wang - Union City CA, US David Do - Milpitas CA, US Satyanarayana Adamala - Fremont CA, US Ronald Trahan - Beverton OR, US
Assignee:
APPLIED MATERIALS, INC. - Santa Clara CA
International Classification:
B08B 3/00
US Classification:
134 26, 1341042
Abstract:
Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.
Jiansheng Wang - Union City CA, US David Do - Milpitas CA, US Satyanarayana Adamala - Fremont CA, US Ronald Trahan - Beverton OR, US
Assignee:
QUANTUM GLOBAL TECHNOLOGIES, LLC - Dublin PA
International Classification:
B08B 3/04
US Classification:
134 56 R, 134115 R, 1341042, 134 941
Abstract:
Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.