Michael Bourbina - Midland MI James R. McCormick - Midland MI Scott A. Wheelock - Bay City MI
Assignee:
Hemlock Semiconductor Corporation - Hemlock MI
International Classification:
B01D 900
US Classification:
422253
Abstract:
The present invention is a float-zone process for forming particulate silicon into monocrystalline silicon. The process employs a reusable silicon conduit having a lower end heated to form a melt zone and an upper end provided with a means for delivering a controlled amount of particulate silicon to the melt zone. A monocrystal silicon seed is used to pull a monocrystalline silicon ingot from the melt zone and particulate silicon is added to the melt zone to replenish silicon removed as monocrystalline silicon.
Method For Analyzing Irregular Shaped Chunked Silicon For Contaminates
Michael Bourbina - Midland MI Lydia L. Hwang - Midland MI Joaquin E. Luna - Saginaw MI Scott A. Wheelock - Freeland MI
Assignee:
Hemlock Semiconductor Corporation - Hemlock MI
International Classification:
G01N 100
US Classification:
356 36
Abstract:
The present invention is a method for analyzing irregular-shaped chunked silicon for low-level contaminates. The method comprises selecting a zonable-chunk of silicon and float-zoning the chunk of silicon to effect a distribution of surface contaminates into the bulk of a monocrystal of silicon. The float-zoned monocrystalline silicon is then processed into a wafer suitable for analysis for low-level contaminates.
Joaquin Enrique Luna - Saginaw MI Scott Allen Wheelock - Freeland MI
Assignee:
Hemlock Semiconductor Corporation - Hemlock MI
International Classification:
C30B 1316
US Classification:
117 49
Abstract:
The present invention is an improved susceptor for a float-zone apparatus for the float-zone processing of silicon elements. The susceptor is of a cylindrical design which allows the susceptor to be positioned around a free end of a silicon element to heat the free end of the silicon element to facilitate inductive coupling of the free end of the silicon element with an RF induction coil heater. In a preferred embodiment of the present invention, the susceptor is formed from tantalum.
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Scott Wheelock Research
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