Shane A Clark

US Patent:

53324439, Jul 26, 1994

Filed:

Jun 9, 1993

Appl. No.:

8/073958

Inventors:

Sandy M.-S. Chew - Fremont CA
Shane D. Clark - Livermore CA
Ron L. Rose - Los Gatos CA
Dale R. DuBois - Los Gatos CA
Cissy Leung - Fremont CA
Alan F. Morrison - San Jose CA
Manus K. Wong - San Jose CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118729

Abstract:

A substrate lifting apparatus for use in a substrate processing apparatus which includes a thermal reactor having a substrate processing chamber and a substrate support located in the chamber. The lifting apparatus consists of a generally circular shaped support with four seats formed therein; four substrate lifting elements, each having a substrate engaging end and a securing tab sized to be received in a seat; a fastener, associated with each lifting element, which secures the tab into the seat; and an adjuster, associated with each lifting element, located between the tab and the seat. When the tab is secured in the seat and the adjuster is operated, the lifting element is caused to move in a plane parallel to a plane formed through the center of the fastener and the adjuster.