Ameet S. Bhansali - Fremont CA Gay M. Samuelson - Tempe AZ Venkatesan Murali - San Jose CA Michael J. Gasparek - Tempe AZ Shou H. Chen - Mesa AZ Nicholas P. Mencinger - Tempe AZ Ching C. Lee - Penang, MY Kevin Jeng - Cupertino CA
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 2144
US Classification:
438612
Abstract:
A bonding pad structure for use with compliant dielectric materials and a method for wire bonding is described in which a rigid layer is formed between the bonding pad and the compliant dielectric layer. The rigid layer increases the stiffness of the bonding structure such that an effective bond may be achieved by conventional ultrasonic and thermosonic bonding methods.
Bonding Pad Structure Having An Interposed Rigid Layer
Ameet S. Bhansali - Fremont CA Gay M. Samuelson - Tempe AZ Venkatesan Murali - San Jose CA Michael J. Gasparek - Tempe AZ Shou H. Chen - Mesa AZ Nicholas P. Mencinger - Tempe AZ Ching C. Lee - Penang, MY Kevin Jeng - Cupertino CA
Assignee:
Intel Corporation - Santa Clara CA
International Classification:
H01L 2358 H01L 23495 H01L 2348
US Classification:
257643
Abstract:
A bonding pad structure for use with compliant dielectric materials and a method for wire bonding is described in which a rigid layer is formed between the bonding pad and the compliant dielectric layer. The rigid layer increases the stiffness of the bonding structure such that an effective bond may be achieved by conventional ultrasonic and thermosonic bonding methods.
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