Sohrab Mobasser Mobasser

US Patent:

20100009495, Jan 14, 2010

Filed:

Aug 12, 2009

Appl. No.:

12/462960

Inventors:

Youngsam Bae - Gardena CA, US
Harish Manohara - Arcadia CA, US
Sohrab Mobasser - Santa Monica CA, US
Choonsup Lee - Pasadena CA, US

Assignee:

California Institute of Technology - Pasadena CA

International Classification:

H01L 31/0232
H01L 21/00

US Classification:

438 72, 257E21001, 257E31127

Abstract:

Described is a device having an anti-reflection surface. The device comprises a silicon substrate with a plurality of silicon spikes formed on the substrate. A first metallic layer is formed on the silicon spikes to form the anti-reflection surface. The device further includes an aperture that extends through the substrate. A second metallic layer is formed on the substrate. The second metallic layer includes a hole that is aligned with the aperture. A spacer is attached with the silicon substrate to provide a gap between an attached sensor apparatus. Therefore, operating as a Micro-sun sensor, light entering the hole passes through the aperture to be sensed by the sensor apparatus. Additionally, light reflected by the sensor apparatus toward the first side of the silicon substrate is absorbed by the first metallic layer and silicon spikes and is thereby prevented from being reflected back toward the sensor apparatus.