A pressure sensing element includes a sensing sub-element disposed on a diaphragm, the element including a shield disposed over the sub-element and configured to substantially eliminate influence of external charge on the sub-element during operation. A method of fabrication and a pressure sensor making use of the pressure sensing element are disclosed.
Mems Pressure Sensor Field Shield Layout For Surface Charge Immunity In Oil Filled Packaging
- Attleboro MA, US Douglas B. Strott - Andover MA, US Stephen P. Greene - Scituate RI, US
International Classification:
G01L 9/06 G01F 1/76 H01L 41/25 G01F 1/44
US Classification:
73861351, 73723, 73727, 7386163, 29 2535
Abstract:
A pressure sensing element includes a sensing sub-element disposed on a diaphragm, the element including a shield disposed over the sub-element and configured to substantially eliminate influence of external charge on the sub-element during operation. A method of fabrication and a pressure sensor making use of the pressure sensing element are disclosed.
Name / Title
Company / Classification
Phones & Addresses
Stephen Greene Chief Executive
Patriot Fence Crafters, Inc State Commercial Banks
82 Home Street, Malden, MA 02148
Stephen Greene President
Patriot Fence Crafters In Trade Contractor · Fencing · Other Construction Material Merchant Whols
3 Fitzgerald Way, Beverly Farms, MA 01915 9789221661, 9784232338, 8004399996
Stephen Greene President
WASTECAP OF MASSACHUSETTS, INC
600 Technology Sq, Boston, MA 02116 652 Massachusetts Ave, Boston, MA 02118
Utah Railway Company
CMO
Utah Railway 2011 - 2011
CMO
Atlantic Railway Jul 2007 - Jan 2010
Vice President & Chief Mechanical Officer 2007 to
OmniTRAX Locomotive Services May 2005 - Oct 2006
Service Area Coordinator
National Passenger Railroad Corporation (Amtrak) May 2003 - Feb 2005
Mechanical Superintendent
Dr. Greene graduated from the University of Vermont COM in 1989. He works in Pittsburgh, PA and 1 other location and specializes in Pediatrics and Adolescent Medicine. Dr. Greene is affiliated with Forbes Hospital and Magee Womens Hospital Of UPMC.
Proactive Work Health Medical Center 44451 16 St W STE 101, Lancaster, CA 93534 6619455999 (phone), 6619482897 (fax)
Proactive Work Health Services 132 S Beaudry Ave, Los Angeles, CA 90012 2139779300 (phone), 2139779600 (fax)
Education:
Medical School University of California, Los Angeles David Geffen School of Medicine Graduated: 1986
Languages:
English Spanish
Description:
Dr. Greene graduated from the University of California, Los Angeles David Geffen School of Medicine in 1986. She works in Lancaster, CA and 1 other location and specializes in General Practice and Occupational Medicine. Dr. Greene is affiliated with Antelope Valley Hospital and Good Samaritan Hospital.