A magnetic lens focuses a charged particle beam generated by an instrument to a very small spot for deriving characteristics of a sample. A magnetic flux pattern is created which provides improved high resolution. The lens includes a polepiece with an inner yoke, an outer yoke and a winding. A lens outer pole is secured to the outer yoke and includes a first surface having a first opening defined therein positioned such that the beam passes therethrough. A lens inner pole is secured to the inner yoke and includes a second surface having a second opening defined therein aligned with the first opening, but with a smaller inner diameter.
A control system for controlling the speed of a boat of the type including a motor having a throttle control lever coupled to a throttle of the motor provides for stable and predictable control of the speed of a boat The control system includes a position detector configured to detect the position of the throttle control lever and to generate a first signal representative of a target speed of the motor; a sensor which generates a second signal representative of the actual speed of the motor; an actuator adapted to control the throttle; and a servo controller, which in response to the first signal and the second signal, generates an output to adjust the position of the actuator.
Removing Noise Caused By Artifacts From A Digital Image Signal
Noise in digitized image data is reduced by providing an array of pixels for each of which a gray level has been determined. For each column of the array, a distribution of gray levels is derived, and a range of acceptable gray levels is set based on the distribution. For pixels with a gray level outside the range, the gray level is changed to reduce the influence of noise in the imaged data.
Michael Lawrence Bufano - Belmont MA, US Steven Raymond Walther - Andover MA, US Peter F. Hays - Medford MA, US William Frederick Thomson - Milford NH, US Arthur Wayne Sommerstein - Marblehead MA, US Gerald Martin Friedman - New Ipswich MA, US P. Michael Fletcher - Chelmsford MA, US Stephen Whittaker Into - Harvard MA, US Anne Testoni - Bolton MA, US Brian S. Phillips - Sherborn MA, US
Improved electron beam sterilization apparatus and shielding techniques for use in are provided. A controller modulates an electron beam when sterilizing an interior to an object to ensure that adequate dose is received. Sterilization carousels are configured with input/discharge feeds to reduce the possibility of humans being exposed to dangerous levels of radiation. The system reduces the amount of shielding required to thereby lower cost of installation.
Michael Lawrence Bufano - Belmont MA, US Steven Raymond Walther - Andover MA, US Peter F. Hays - Medford MA, US William Frederick Thomson - Milford NH, US Arthur Wayne Sommerstein - Marblehead MA, US Gerald Martin Friedman - New Ipswich MA, US P. Michael Fletcher - Chelmsford MA, US Stephen Whittaker Into - Harvard MA, US Anne Testoni - Bolton MA, US Brian S. Phillips - Sherborn MA, US
Improved electron beam sterilization apparatus and shielding techniques for use in are provided. A controller modulates an electron beam when sterilizing an interior to an object to ensure that adequate dose is received. Sterilization carousels are configured with input/discharge feeds to reduce the possibility of humans being exposed to dangerous levels of radiation. The system reduces the amount of shielding required to thereby lower cost of installation.
A control system for controlling the speed of a boat of the type including a motor having a throttle control lever coupled to a throttle of the motor provides for stable and predictable control of the speed of a boat The control system includes a position detector configured to detect the position of the throttle control lever and to generate a first signal representative of a target speed of the motor; a sensor which generates a second signal representative of the actual speed of the motor; an actuator adapted to control the throttle; and a servo controller, which in response to the first signal and the second signal, generates an output to adjust the position of the actuator.
Marc Abouaf - Harvard MA, US Stephen W. Into - Harvard MA, US Matthew A. Simpson - Sudbury MA, US
Assignee:
SAINT-GOBAIN CERAMICS & PLASTICS, INC. - Worcester MA
International Classification:
H01L 21/683 B05D 3/02
US Classification:
361234, 4273855, 427386, 427294
Abstract:
An electrostatic chuck includes an insulating layer, a conductive layer overlying the insulating layer, a dielectric layer overlying the conductive layer, the dielectric layer having pores forming interconnected porosity, and a cured polymer infiltrant residing in the pores of the dielectric layer.
Ara Vartabedian - Hudson MA, US Marc Abouaf - Harvard MA, US Stephen W. Into - Harvard MA, US Matthew A. Simpson - Sudbury MA, US
Assignee:
SAINT-GOBAIN CERAMICS & PLASTICS, INC. - Worcester MA
International Classification:
C23C 16/458 H01L 21/683 C23C 16/00
US Classification:
427569, 361234, 118723 R
Abstract:
A processing device includes a plurality of walls defining an interior space configured to be exposed to plasma and a surface coating on the interior surface of at least one of the plurality of walls. The surface coating includes pores forming interconnected porosity. The processing device further includes a sealant residing in at least a portion of the pores of the surface coating. In an embodiment, the sealant can be a thermally cured sealant having a cure temperature not greater than about 100 C. In another embodiment, the sealant can be an epoxy sealant having a viscosity of not greater than 500 cP in liquid precursor form. In yet another embodiment, the sealant can be a low shrinkage sealant characterized by a solidification shrinkage of not greater than 8%.
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