Roy Mallory - Bedford MA, US Jaydeep Kumar Sinha - Mansfield MA, US Stephen MacLeod - Mansfield MA, US
International Classification:
G01R 27/26
US Classification:
324690
Abstract:
A wafer edge detection system comprising a probe assembly having one or more capacitive plates conforming in edge shape to an edge shape of a wafer; and processing electronics for electronically driving the one or more capacitive plates and for sensing an electrical signal representing capacitance between each one or more plates and the wafer. Filtering and demodulation techniques enhance the signal to noise ratio.
15 years as Golf Course Superintendent, 20 Years CGCS
15 years as Consultant to Golf Course and Sports Turf Operators
Golf Course Construction, Renovation and... 15 years as Golf Course Superintendent, 20 Years CGCS
15 years as Consultant to Golf Course and Sports Turf Operators
Golf Course Construction, Renovation and Routine Operations Expert
PGA Tour Tournament Preparation Experience, In Country and Abroad
Proven Efficiency in Both Warm and Cool...