Stephen W Sumner

US Patent:

7607543, Oct 27, 2009

Filed:

Feb 26, 2006

Appl. No.:

11/364562

Inventors:

Barry Gregerson - Deephaven MN, US
David Halbmaier - Shorewood MN, US
Stephen Sumner - Minneapolis MN, US
Brian Wiseman - Glencoe MN, US
Anthony Mathius Tieben - Jordon MN, US
Justin Strike - Maple Grove MN, US

Assignee:

Entegris, Inc. - Chaska MN

International Classification:

B65D 85/00

US Classification:

206710, 355 72, 355 75, 4142171

Abstract:

The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.

US Patent:

20060244942, Nov 2, 2006

Filed:

Feb 26, 2006

Appl. No.:

11/364860

Inventors:

Barry Gregerson - Deephaven MN, US
David Halbmaier - Shorewood MN, US
Stephen Sumner - Minneapolis MN, US
Brian Wiseman - Glencoe MN, US
Anthony Tieben - Jordon MN, US
Justin Strike - Maple Grove MN, US

International Classification:

G03B 27/58

US Classification:

355072000, 355053000

Abstract:

The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.