Steven T Daley

US Patent:

20060201250, Sep 14, 2006

Filed:

Mar 10, 2005

Appl. No.:

11/076649

Inventors:

Anthony Kourepenis - Acton MA, US
Marc Weinberg - Needham MA, US
Richard Elliott - Stoneham MA, US
Steven Daley - Allston MA, US

International Classification:

G01P 15/08

US Classification:

073504160

Abstract:

A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.