Steven R Meeks

US Patent:

6624884, Sep 23, 2003

Filed:

Apr 28, 1997

Appl. No.:

08/840351

Inventors:

Wayne Isami Imaino - San Jose CA
Anthony Juliana, Jr. - San Jose CA
Milton Russell Latta - San Jose CA
Charles H. Lee - San Jose CA
Wai Cheung Leung - San Jose CA
Hal J. Rosen - Los Gatos CA
Steven Meeks - San Jose CA

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G01N 2188

US Classification:

3562372

Abstract:

A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In an embodiment of the invention, light reflected from the surface at an angle slightly offset from perpendicular is routed through a telecentric lens to a detector which converts the intensity of the reflected beam into an analog signal. The analog signal is sampled and digitized to generate pixel data. A data acquisition system sequentially stores the pixel data in a buffer. A median filter and derivative analysis can be applied to the pixel data to detect deviations indicating defects. An optional calibration system periodically reflects the scanning beam back to a detector to form a reference signal for use in absolute reflectivity measurements.

US Patent:

6665078, Dec 16, 2003

Filed:

Oct 7, 1999

Appl. No.:

09/414388

Inventors:

Steven W. Meeks - San Jose CA
Rusmin Kudinar - Union City CA

Assignee:

Candela Instruments - Fremont CA

International Classification:

G01B 1106

US Classification:

356600

Abstract:

A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film magnetic disks and silicon wafers at angles that are not substantially Brewsters angle of the thin film (carbon) protective overcoat is provided. The system and method involve a focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. This generates both reflected and scattered light that may be measured to determine various values and properties related to the surface of the disk, including identifying the Kerr-effect in reflected light for determination of point magnetic properties. In addition, the present invention can mark the position of an identified defect.

US Patent:

6704435, Mar 9, 2004

Filed:

Apr 28, 1997

Appl. No.:

08/841214

Inventors:

Wayne Isami Imaino - San Jose CA
Anthony Juliana - San Jose CA
Milton Russell Latta - San Jose CA
Charles H. Lee - San Jose CA
Wai Cheung Leung - San Jose CA
Hal J. Rosen - Los Gatos CA
Steven Meeks - San Jose CA

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G06K 900

US Classification:

382108

Abstract:

A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. The reflected beam is routed to a detector which converts the intensity of the reflected into an analog signal. The analog signal is sampled and digitized to generate pixel data stored in a buffer. Various analyses are performed on the data including calculating a rate of change in the pixel data. If the rate of change in the pixel data exceeds a selected threshold that indicates a possible defect if it occurs in the data area of the disk.

US Patent:

6717671, Apr 6, 2004

Filed:

Jul 2, 1999

Appl. No.:

09/347622

Inventors:

Steven W. Meeks - San Jose CA
Rusmin Kudinar - Union City CA

Assignee:

Candela Instruments - Fremont CA

International Classification:

G01J 404

US Classification:

356369

Abstract:

A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film magnetic disks at angles that are not substantially Brewsters angle of the thin film protective overcoat.

US Patent:

6751044, Jun 15, 2004

Filed:

Oct 29, 1999

Appl. No.:

09/430614

Inventors:

Steven W. Meeks - San Jose CA
Richard D. LeSage - Longmont CO
David S. McMurtrey - Loveland CO
Peter R. Svendsen - Colorado Springs CO
W. Craig Tomalty - Colorado Springs CO

Assignee:

Maxtor Corporation - Longmont CO

International Classification:

G11B 5596

US Classification:

360 7703, 360 51

Abstract:

A magneto-optical clock head is disclosed. The magneto-optical clock head allows a longitudinally recorded clock track to be read from a disk surface from a position outside of a head-disk assembly (HDA). The clock track has sections of alternating magnetization which define transitions. Importantly, the magneto-optical clock head is used to sense the transitions using the transverse Kerr effect, as opposed to the longitudinal Kerr effect as used in one prior technique. In one embodiment, the magneto-optical clock head includes a light source for generating a p-polarized beam which is aligned in such a manner that it strikes the clock track. A reflected beam is then produced which has an intensity that varies based upon the direction of the magnetization of the sections of alternating magnetization of the clock track due to the transverse Kerr effect. A detector is provided to detect the intensity variations in the reflected beam and to ultimately generate a clock signal which is provided to transducers to allow them to appropriately write servo information onto their respective disk surfaces. A method for optically reading a clock signal stored within a clock track which is written onto a disk surface that is located within a head disk assembly of a disk drive is also provided.

US Patent:

6956658, Oct 18, 2005

Filed:

Sep 12, 2003

Appl. No.:

10/660984

Inventors:

Steven W. Meeks - San Jose CA, US
Rusmin Kudinar - Union City CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G01B011/30

US Classification:

356600

Abstract:

A system and method for performing a magnetic imaging, optical profiling, and measuring lubricant thickness and degradation, carbon wear, carbon thickness, and surface roughness of thin film magnetic disks and silicon wafers at angles that are not substantially Brewster's angle of the thin film (carbon) protective overcoat is provided. The system and method involve a focused optical light whose polarization can be switched between P or S polarization is incident at an angle to the surface of the thin film magnetic disk. This generates both reflected and scattered light that may be measured to determine various values and properties related to the surface of the disk, including identifying the Kerr-effect in reflected light for determination of point magnetic properties. In addition, the present invention can mark the position of an identified defect.

US Patent:

6956660, Oct 18, 2005

Filed:

Feb 18, 2004

Appl. No.:

10/782267

Inventors:

Steven W. Meeks - San Jose CA, US
Rusmin Kudinar - Union City CA, US

Assignee:

KLA-Tencor Technologies - Milpitas CA

International Classification:

G01B011/28

US Classification:

356630

Abstract:

A system and method for measuring a phase difference between first and second reflected polarized light signal components, including transmitting a first incident light signal toward a first object, wherein the first object is a magnetic disk and/or a glass substrate. Seperating from a reflected light signal, a first mixed reflected polarized light signal component having a first phase and a second mixed reflected polarized light signal component having a second phase that is different from said first phase, wherein said mixed reflected polarized light signal components comprises both P-polarized and S-polarized light relative to a plane of incidence of said reflected light signal. Detecting the intensities of said first and second mixed reflected polarized light signal components, and determining a difference in phase between said first and second mixed reflected polarized light signal component based upon said first and second intensities.

US Patent:

7161669, Jan 9, 2007

Filed:

Mar 1, 2006

Appl. No.:

11/365221

Inventors:

Vamsi Velidandla - San Jose CA, US
Anoop Somanchi - Fremont CA, US
Ronny Soetarman - Fremont CA, US
Steven W. Meeks - Fremont CA, US

Assignee:

KLA- Tencor Technologies Corporation - Milpitas CA

International Classification:

G01N 21/88

US Classification:

3562372

Abstract:

In one embodiment, a system to inspect an edge region of a wafer, comprises a surface analyzer assembly comprising a radiation targeting assembly that targets a radiation beam onto a surface of the wafer; a reflected radiation collection assembly to collect radiation reflected from a surface of the wafer; means for rotating the surface analyzer assembly about an edge surface of the wafer; and means for detecting one or more defects in the edge region of the wafer.