Steven F Pugh

US Patent:

20090017601, Jan 15, 2009

Filed:

Apr 28, 2008

Appl. No.:

12/111126

Inventors:

Russell F. Jewett - Charlotte NC, US
Steven F. Pugh - Charlotte NC, US
Paul Wickboldt - Walnut Creek CA, US

International Classification:

H01L 21/205

US Classification:

438478, 257E21102

Abstract:

Methods of depositing thin film materials having crystalline content are provided. The methods use plasma enhanced chemical vapor deposition. According to one embodiment of the present invention, microcrystalline silicon films are obtained. According to a second embodiment of the present invention, crystalline films of zinc oxide are obtained. According to a third embodiment of the present invention, crystalline films of iron oxide are obtained.

US Patent:

20130196081, Aug 1, 2013

Filed:

Jan 17, 2013

Appl. No.:

13/743807

Inventors:

Russell F. JEWETT - Charlotte NC, US
Steven F. PUGH - Charlotte NC, US
Paul WICKBOLDT - Walnut Creek CA, US

International Classification:

C23C 16/505
C23C 16/24

US Classification:

427578

Abstract:

Methods of depositing thin film materials having crystalline content are provided. The methods use plasma enhanced chemical vapor deposition. According to one embodiment of the present invention, microcrystalline silicon films are obtained. According to a second embodiment of the present invention, crystalline films of zinc oxide are obtained. According to a third embodiment of the present invention, crystalline films of iron oxide are obtained.

US Patent:

20230071898, Mar 9, 2023

Filed:

Sep 3, 2021

Appl. No.:

17/466251

Inventors:

- Erlanger KY, US
Steven Franklin Pugh - Charlotte NC, US
Richard Mark Simons - London, GB

International Classification:

A61L 2/10
G01N 21/64
A61L 9/20

Abstract:

An apparatus and method for irradiating a fluid containing a material to be irradiated, comprising at least one irradiation chamber having at least one inlet port, one or more UV radiation sources inside the irradiation chamber(s) optically coupled to the fluid in the irradiation chamber(s) via at least one UV-transparent window in contact with the fluid; one or more seals or gaskets disposed adjacent to the radiation sources to protect them from the fluid; and at least one heat exchange mechanism inside the irradiation chamber(s) thermally coupled to the radiation sources and to the fluid. The UV radiation sources and the at least one heat exchange mechanism are at least partially submerged in the fluid in the irradiation chamber.

US Patent:

20210162083, Jun 3, 2021

Filed:

Feb 15, 2021

Appl. No.:

17/176079

Inventors:

- Erlanger KY, US
Steven Franklin Pugh - Charlotte NC, US
John Krause - Charlotte NC, US
Oliver Lawal - Walton KY, US
Richard Mark Simons - London, GB

International Classification:

A61L 2/10
C02F 1/32

Abstract:

An apparatus and method for irradiating a fluid containing a material to be irradiated, comprising at least one irradiation chamber having at least one inlet port and outlet port, at least one fluid cooling chamber having at least one inlet port and outlet port, one or more UV radiation sources coupled to the irradiation chamber(s); and at least one heat exchange mechanism thermally coupled to the radiation source(s) and the cooling chamber(s). At least a portion of the interior surface of the cooling chamber(s) may comprise at least a portion of the exterior surface of the irradiation chamber(s) so the cooling chamber(s) is in fluid communication with the irradiation chamber(s).

US Patent:

20200069825, Mar 5, 2020

Filed:

Nov 11, 2019

Appl. No.:

16/679491

Inventors:

JENNIFER GODWIN PAGAN - CHARLOTTE NC, US
STEVEN FRANKLIN PUGH - CHARLOTTE NC, US
JOHN KRAUSE - CHARLOTTE NC, US
OLIVER LAWAL - WALTON KY, US
RICHARD MARK SIMONS - LONDON, GB

International Classification:

A61L 2/10
C02F 1/32

Abstract:

An apparatus and method for irradiating a fluid containing a material to be irradiated, comprising at least one irradiation chamber having at least one inlet port and outlet port, at least one fluid cooling chamber having at least one inlet port and outlet port, one or more UV radiation sources coupled to the irradiation chamber(s); and at least one heat exchange mechanism thermally coupled to the radiation source(s) and the cooling chamber(s). At least a portion of the interior surface of the cooling chamber(s) may comprise at least a portion of the exterior surface of the irradiation chamber(s) so the cooling chamber(s) is in fluid communication with the irradiation chamber(s).

US Patent:

20190046674, Feb 14, 2019

Filed:

Aug 13, 2018

Appl. No.:

16/101890

Inventors:

Jennifer Godwin Pagan - Charlotte NC, US
Steven Franklin Pugh - Charlotte NC, US
John Krause - Charlotte NC, US
Oliver Lawal - Walton KY, US
Richard Mark Simons - London, GB

International Classification:

A61L 2/10
C02F 1/32

Abstract:

An apparatus and method for irradiating a fluid containing a material to be irradiated, comprising at least one irradiation chamber having at least one inlet port and outlet port, at least one fluid cooling chamber having at least one inlet port and outlet port, one or more UV radiation sources coupled to the irradiation chamber(s); and at least one heat exchange mechanism thermally coupled to the radiation source(s) and the cooling chamber(s). At least a portion of the interior surface of the cooling chamber(s) may comprise at least a portion of the exterior surface of the irradiation chamber(s) so the cooling chamber(s) is in fluid communication with the irradiation chamber(s).

US Patent:

20190046675, Feb 14, 2019

Filed:

Aug 13, 2018

Appl. No.:

16/101909

Inventors:

Jennifer Godwin Pagan - Charlotte NC, US
Steven Franklin Pugh - Charlotte NC, US
John Krause - Charlotte NC, US
Oliver Lawal - Walton KY, US
Richard Mark Simons - London, GB

International Classification:

A61L 2/10
C02F 1/32

Abstract:

An apparatus and method for irradiating a fluid containing a material to be irradiated, comprising at least one irradiation chamber having at least one inlet port and outlet port, at least one fluid cooling chamber having at least one inlet port and outlet port, one or more UV radiation sources coupled to the irradiation chamber(s); and at least one heat exchange mechanism thermally coupled to the radiation source(s) and the cooling chamber(s). At least a portion of the interior surface of the cooling chamber(s) may comprise at least a portion of the exterior surface of the irradiation chamber(s) so the cooling chamber(s) is in fluid communication with the irradiation chamber(s).