Steven R Richards

US Patent:

8101488, Jan 24, 2012

Filed:

Dec 25, 2010

Appl. No.:

12/978558

Inventors:

Theodore H. Smick - Essex MA, US
Steven Richards - Georgetown MA, US
Geoffrey Ryding - Manchester MA, US
Kenneth H Purser - Gloucester MA, US

Assignee:

Twin Creeks Technologies, Inc. - San Jose CA

International Classification:

H01L 21/336
H01L 21/425

US Classification:

438305, 438514, 438515, 438520, 250423 R, 250424, 25049221, 257E21001

Abstract:

Embodiments of the present invention provide for a system for accelerating hydrogen ions. A hydrogen generator holding a supply of water is configured to generate a flow of hydrogen gas from the supply of water. An ion source structure is configured to generate a plurality of hydrogen ions from the flow of hydrogen gas. An accelerator tube is configured to accelerate the plurality of hydrogen ions. The supply of water has an isotopic ratio of deuterium that is smaller than the isotopic ratio of deuterium in Vienna Standard Mean Ocean Water.

US Patent:

20080073553, Mar 27, 2008

Filed:

Feb 13, 2007

Appl. No.:

11/674447

Inventors:

Julian Blake - Gloucester MA, US
Steven Richards - Georgetown MA, US

Assignee:

IBIS TECHNOLOGY CORPORATION - Danvers MA

International Classification:

G01K 1/08

US Classification:

250398000

Abstract:

In one aspect, an ion beam profiler for use in an ion implanter is disclosed that includes a Faraday cup disposed in an end-station of the ion implanter in a path of an ion beam traveling from a source to the end-station. The Faraday cup comprises an aperture that is adapted to allow passage of a cross-sectional slices of the beam. An array of ion detectors is disposed behind the Faraday cup in substantial register with the aperture so as to receive different slices of the beam as the beam is scanned across the aperture. The bean profiler further comprises an analyzer that is coupled to the detector array for analyzing detector signals generated in response to ion impingement so as to compute a two-dimensional cross-sectional profile of the beam.

US Patent:

20120146555, Jun 14, 2012

Filed:

Jul 20, 2011

Appl. No.:

13/186513

Inventors:

Geoffrey Ryding - Manchester MA, US
Steven Richards - Georgetown MA, US
Paul Eide - Stratham NH, US
Theodore H. Smick - Essex MA, US
Malcolm Barnett - East Preston, GB

Assignee:

TWIN CREEKS TECHNOLOGIES, INC. - San Jose CA

International Classification:

H05H 7/22

US Classification:

315506

Abstract:

A d. c. charged particle accelerator comprises accelerator electrodes separated by insulating spacers defining acceleration gaps between adjacent pairs of electrodes. Individually regulated gap voltages are applied across each adjacent pair of accelerator electrodes. In an embodiment, direct connections are provided to gap electrodes from the stage points of a multistage Cockcroft Walton type voltage multiplier circuit. The described embodiment enables an ion beam to be accelerated to high energies and high beam currents, with good accelerator stability.