Steven Mark Yalisove

US Patent:

20100038825, Feb 18, 2010

Filed:

Dec 21, 2007

Appl. No.:

11/963573

Inventors:

Joel P. McDonald - Albuquerque NM, US
Steven M. Yalisove - Ann Arbor MI, US
Gerard Mourou - Paris, FR

International Classification:

B29C 35/08

US Classification:

264400

Abstract:

Microscale and/or nanoscale structural features are formed in material by using an ultrashort pulsed laser (e.g., a femtosecond pulsed laser). Methods of forming such structures comprise applying laser energy generated by an ultrashort pulsed laser to a surface of a substrate having a first layer and a distinct second layer. The first layer has a first ablation threshold that is less than the applied laser energy and the second layer has a second ablation threshold that is greater than the applied laser energy. The laser energy penetrates through the second layer to the first layer. The applied laser energy results in damage (or an ablation event) at the first layer that exerts force sufficient to delaminate the second layer, thereby forming a void space that is a channel having a major elongate axis or alternately forming an open groove.

US Patent:

20180277366, Sep 27, 2018

Filed:

Sep 16, 2016

Appl. No.:

15/760549

Inventors:

- Ann Arbor MI, US
Steven YALISOVE - Ann Arbor MI, US
Ben TORRALVA - Ann Arbor MI, US

International Classification:

H01L 21/02
B23K 26/00
B23K 26/0622

Abstract:

The interaction between multiple intense ultrashort laser pulses and solids typically produces a regular nanoscale surface corrugation. A coupled mechanism has been identified that operates in a specific range of fluences in GaAs that exhibits transient loss of the imaginary part of the dielectric function and X2, which produces a unique corrugation known as high spatial frequency laser induced periodic surface structures (HSFL). This mechanism is unique in that the corrugation does not involve melting or ablation.