Stuart D Allen

US Patent:

8252375, Aug 28, 2012

Filed:

Jun 8, 2005

Appl. No.:

11/148543

Inventors:

William A. Moffat - San Jose CA, US
Boris C. Randazzo - Patterson CA, US
Craig W. McCoy - San Jose CA, US
Stuart V. Allen - Gilroy CA, US

Assignee:

Yield Engineering Systems, Inc. - Livermore CA

International Classification:

C23C 16/00

US Classification:

4272481, 118715

Abstract:

A process for the coating of substrates comprising insertion of a substrate into a process oven, plasma cleaning of the substrate, dehydration of the substrate, withdrawal of a metered amount of one or more chemicals from one or more chemical reservoirs, vaporizing the withdrawn chemicals in one or more vapor chambers, and transfer of the vaporized chemicals into a process oven, thereby reacting with the substrate. An apparatus for the coating of substrates comprising a process oven, a gas plasma generator, a metered chemical withdrawal subsystem, and a vaporization subsystem.

US Patent:

20050089695, Apr 28, 2005

Filed:

May 11, 2004

Appl. No.:

10/843774

Inventors:

William Moffat - San Jose CA, US
Boris Randazzo - Hollister CA, US
Craig McCoy - San Jose CA, US
Stuart Allen - Gilroy CA, US

International Classification:

B32B025/20

US Classification:

428429000

Abstract:

A silane coated substrate with a consistent surface energy across its surface. This consistent silane layer has a contact angle with a variation of less than +/−10 degrees as measured by a goniometer. The consistent silane layer also retains its consistency in moist environments. A silane layer with a minimum of defects.

US Patent:

20060121197, Jun 8, 2006

Filed:

Jan 20, 2006

Appl. No.:

11/335945

Inventors:

William Moffat - San Jose CA, US
Boris Randazzo - Patterson CA, US
Craig McCoy - San Jose CA, US
Stuart Allen - Gilroy CA, US

International Classification:

C23C 16/00

US Classification:

427248100

Abstract:

A process for the coating of substrates which are at least partially coated with indium tin oxide comprising insertion of a substrate into a process oven, dehydration of the substrate, plasma cleaning of the substrate, vaporizing chemicals in one or more vapor chambers, and transfer of the vaporized chemicals into a process oven, thereby coating the substrate.

US Patent:

20070231485, Oct 4, 2007

Filed:

Oct 23, 2006

Appl. No.:

11/585656

Inventors:

William Moffat - San Jose CA, US
Craig McCoy - San Jose CA, US
Stuart Allen - Gilroy CA, US

International Classification:

C23C 16/00

US Classification:

427248100, 118733000

Abstract:

A process chamber for the coating of substrates with silanes with a double door seal. The double door seal may have a cavity between the seals which may be evacuated or pressurized, including with an inert gas. An apparatus for the coating of substrates comprising a process oven, a gas plasma subsystem, a metered chemical withdrawal subsystem, a vacuum subsystem, a vaporization subsystem, and a double door seal. A process oven utilizing a double sealed door with pressurized inert gas between the seals to reduce oxygen contamination and risks associated with silane processes.

US Patent:

20130000557, Jan 3, 2013

Filed:

Jun 4, 2012

Appl. No.:

13/487521

Inventors:

William A. Moffat - San Jose CA, US
Boris C. Randazzo - Patterson CA, US
Craig W. McCoy - San Jose CA, US
Stuart V. Allen - Gilroy CA, US

International Classification:

C23C 16/50
C23C 16/505

US Classification:

118723 E, 118723 R

Abstract:

A process for the coating of substrates comprising insertion of a substrate into a process oven, plasma cleaning of the substrate, dehydration of the substrate, withdrawal of a metered amount of one or more chemicals from one or more chemical reservoirs, vaporizing the withdrawn chemicals in one or more vapor chambers, and transfer of the vaporized chemicals into a process oven, thereby reacting with the substrate. An apparatus for the coating of substrates comprising a process oven, a gas plasma generator, a metered chemical withdrawal subsystem, and a vaporization subsystem.

US Patent:

60627611, May 16, 2000

Filed:

May 1, 1998

Appl. No.:

9/071727

Inventors:

Stuart Vernon Allen - Gilroy CA

International Classification:

F16B 204

US Classification:

403170

Abstract:

A connector for standard commercial square or rectangular tubing. The connector consists of a cubic or otherwise appropriately shaped block with projecting sections in each direction where tubing is intended to be connected. The projecting sections fit loosely inside the tubing. Each projection has internal cams that drive radial pins outward to engage the inner surface of the tubing. Cam movement is accomplished by a screw perpendicular to the axis of the tubing.

US Patent:

58156372, Sep 29, 1998

Filed:

May 13, 1996

Appl. No.:

8/645341

Inventors:

Stuart V. Allen - Gilroy CA
Robert Bruce Eglinton - Carmel CA

Assignee:

Semifab Corporation - Hollister CA

International Classification:

F22B 128
F24F 314

US Classification:

392400

Abstract:

The humidifier for controlling humidity in a semi-conductor manufacturing environment provides a trickle water refill level control system for maintaining an accurate flow of refill water into the humidifier water tank. A water supply provides a substantially constant rate of flow of water to a conduit connected between the humidifier tank inlet port and the water overflow tank inlet port, to allow the excess water supplied to the humidifier water tank to flow to the overflow tank. The overflow tank has a float level control allowing for operation of the steam generating humidifier at higher steam pressures, and increased stability of the steam generation rate. A pressure equalization line is also connected between an upper portion of the humidifier water tank and an upper air reservoir of the water overflow tank for equalizing pressure between the humidifier water tank and the water overflow tank.

US Patent:

59044373, May 18, 1999

Filed:

Jul 10, 1997

Appl. No.:

8/891256

Inventors:

Stuart Vernon Allen - Gilroy CA

International Classification:

F16B2/04

US Classification:

403170

Abstract:

A connector for square or rectangular tubing. The connector consists of a cubic or otherwise appropriately shaped block with projecting sections in each direction where tubing is intended to be connected. The projecting sections fit loosely inside the tubing. Each projection has an internal cam that is rotated in place to drive radial pins outward to engage the inner surface of the tubing. Cam rotation is accomplished by screw means that are mounted transverse to the axis of the tube and engage the cam tangentially. In some embodiments, additional screw means engage the cam to cause contrary rotation to disassemble the connection.