Tan N Tran

US Patent:

8076921, Dec 13, 2011

Filed:

Sep 18, 2008

Appl. No.:

12/284475

Inventors:

Kristopher Nodianos - Waldorf MD, US
Laura Blachek - Charlotte Hall MD, US
Khoa Nguyen - Alexandria VA, US
Adedayo Oyelowo - Alexandria VA, US
Tan Tran - New Bern NC, US
Bernice Sanford - Bel Alton MD, US
Kevin Cochran - Falls Church VA, US

Assignee:

The United States of America as represented by the Secretary of the Navy - Washington DC

International Classification:

G05F 3/02

US Classification:

323304

Abstract:

Systems and methods for a self-regulating power supply for MEMS thermal actuators to achieve maximum actuator displacement while preventing over powering. The present invention includes a power supply configured to regulate electrical input power to a MEMS thermal actuator in order to provide the maximum possible electrical input power. Accordingly, the present invention provides a maximum actuator displacement while preventing device failure from over powering. The present invention utilizes resistivity versus temperature properties for silicon or the like to provide a self-regulating power supply that can be utilized to power a variety of MEMS components without requiring custom actuator control circuits for each type of component.