Tatiana Y Kerzhner

US Patent:

8062470, Nov 22, 2011

Filed:

May 12, 2008

Appl. No.:

12/152064

Inventors:

Yuri Glukhoy - San Francisco CA, US
Tatiana Kerzhner - San Francisco CA, US
Anna Ryaboy - San Francisco CA, US

International Classification:

C23C 16/00
H01L 21/306

US Classification:

1563452, 118718, 118723 I, 118723 AN, 15634548

Abstract:

A method and an apparatus are proposed for simultaneously coating the inner walls of a plurality of hollow containers, such as bottles, with fluid-impermeable barrier layers applied by a PECVD method with the use of transversal antennas capable of creating plasma having density increased in the vicinity of the inner walls of the containers. The barrier-layer application period is divided into a coating period and a noncoating cooling period, with RF energy constantly maintained under working conditions with shunting thereof from the coating station to the dummy loads during noncoating periods used for cooling the plastic containers. The apparatus comprises a vacuum chamber with a conveyor that transports the containers in a preoriented state for interaction with a plurality of aligning elements that can be inserted into the container openings for subsequent fixation at equal distances in positions aligned with the antennas that can be inserted into the containers for generation of the coating-applying plasma.

US Patent:

20090284421, Nov 19, 2009

Filed:

May 16, 2008

Appl. No.:

12/152789

Inventors:

Yuri Glukhoy - San Francisco CA, US
Tatiana Kerzhner - San Francisco CA, US
Anna Ryaboy - San Francisco CA, US

International Classification:

H01Q 1/26

US Classification:

343701

Abstract:

An antenna assembly that consists of a holder which supports a transversal RF antenna with a plurality of multiturn coils connected in series or in parallel and intended for generation of an inductively coupled plasma discharge inside a container with a high plasma density in vicinity of the container's inner walls. The aforementioned discharge is used for inducing in the container a plasma chemical reaction between oxygen and organosilane with resulting deposition of the reaction product in the form of silicon dioxide onto the inner walls of the container for forming a fluid-impermeable barrier layer. A specific feature of the antenna is that it generates a magnetic field transversal to the longitudinal axis of the antenna, i.e., normal to the container's walls, where a maximal electric field, maximal plasma density and, correspondingly, maximal rate of deposition of silicon dioxide on the wall are provided.

US Patent:

20090297730, Dec 3, 2009

Filed:

May 30, 2008

Appl. No.:

12/156148

Inventors:

Yuri Glukhoy - San Francisco CA, US
Tatiana Kerzhner - San Francisco CA, US
Anna Ryaboy - San Francisco CA, US

International Classification:

C23C 16/505

US Classification:

427571, 118723 I

Abstract:

An antenna assembly for forming a barrier coating on the inner surface of a tube by means of a sealed annular chemical-plasma-reaction chamber defined by the inner wall of the tube, two spaced elements slidingly and sealingly moveable inside the tube, and a quartz tube that interconnects the cylindrical elements. The coating is formed by a PE CVD process generated inside the chamber by a transversal RF antenna unit which creates a plasma column that participates in rotation simultaneously with linear motion thus providing uniform coating of the inner surface of the tube. The method of the invention consists of depositing a layer of silicon dioxide onto the inner surface of a plastic tube by means of the aforementioned antenna assembly. The plasma column is rotated by the RF magnetic field which is rotated by using two RF generators of different frequencies that energize two groups of specifically interconnected coils.