Terri Lynn Shofner

US Patent:

6825467, Nov 30, 2004

Filed:

Jun 25, 2002

Appl. No.:

10/180221

Inventors:

Jennifer Lynn Drown - Orlando FL
Kim Elshot - Winter Park FL
Erik Cho Houge - Orlando FL
Terri Lynn Shofner - North Plains OR
Tingkwan Cheung - Singapore, SG

Assignee:

Agere Systems, Inc. - Allentown PA

International Classification:

G01N 23203

US Classification:

250307, 250306, 250310

Abstract:

The present invention provides and apparatus and method for scanning a crystalline sample comprising a sample holder, an electron source for generating an electron beam and a scanning actuator for controlling the relative movement between the electron beam and the crystalline sample. In addition, an image processor is provided for processing images from electrons from the crystalline sample and a controller for controlling the scanning actuator to space points on the crystalline sample, at which the electron beam is directed. The points are preferably spaced apart a distance that is at least as large as a known grain size of the crystalline sample. The controller determines a grain orientation with respect to each point within a series of points within a scan area of the crystalline sample. The controller determines an average grain orientation for the crystalline sample for current image and a previously processed image. The controller monitors a variance in the average deviation and terminates the scanning when the variance in the average grain orientation approaches a predetermined value.