Thang Van Nguyen

US Patent:

20200051781, Feb 13, 2020

Filed:

Oct 17, 2019

Appl. No.:

16/655582

Inventors:

- San Jose CA, US
Thang Nguyen - San Jose CA, US
Ajay Baranwal - Dublin CA, US
Michael J. Meyer - Palo Alto CA, US
Suhas Pillai - San Jose CA, US

Assignee:

D2S, Inc. - San Jose CA

International Classification:

H01J 37/317

Abstract:

Methods for fracturing or mask data preparation are disclosed in which a set of single-beam charged particle beam shots is input; a calculated image is calculated using a neural network, from the set of single-beam charged particle beam shots; and a set of multi-beam shots is generated based on the calculated image, to convert the set of single-beam charged particle beam shots to the set of multi-beam shots which will produce a surface image on the surface. Methods for training a neural network include inputting a set of single-beam charged particle beam shots; calculating a set of calculated images using the set of single-beam charged particle beam shots; and training the neural network with the set of calculated images.

US Patent:

20200011652, Jan 9, 2020

Filed:

Jul 3, 2018

Appl. No.:

16/026982

Inventors:

- Santa Clara CA, US
Cheuk Ming LEE - Castro Valley CA, US
Jae Myung YOO - San Jose CA, US
Glen Alan GOMES - San Jose CA, US
David Michael CORRIVEAU - Sacramento CA, US
Thang Duc NGUYEN - Milpitas CA, US

International Classification:

G01B 9/02
G03F 7/20

Abstract:

Processing systems and methods used in the manufacturing of flat panel displays (FPDs) are provided herein. In one embodiment, a processing system features a motion stage movably disposed on a base surface, one or more X-position interferometers, and a plurality of Y-position interferometers. The X-position interferometers include an X-position mirror fixedly coupled to the motion stage and an X-axis stationary module fixedly coupled a non-moving surface of processing system. Each of the plurality of Y-position interferometers include one of a first or second Y-position mirror fixedly coupled to the motion stage in orthogonal relationship to the one or more X-position mirrors and one of a first or a second Y-axis stationary module fixedly coupled to a non-moving surface of the processing system. Here, each of the Y-axis stationary modules is positioned to direct coherent radiation towards a respective Y-position mirror when the Y-position interferometer thereof is in an active arrangement.