Theodore Vermeulen

US Patent:

61401439, Oct 31, 2000

Filed:

Feb 10, 1992

Appl. No.:

7/833417

Inventors:

Lee A. Christel - Menlo Park CA
Theodore J. Vermeulen - Portland OR

Assignee:

Lucas Novasensor Inc. - Fremont CA

International Classification:

H01L 2100

US Classification:

438 53

Abstract:

A method of micromachining silicon to form relatively thick boss areas and relatively thin flexure areas. The method includes the provision of a deep diffusion of n-type dopant atoms in the vicinity of the desired thick boss structures on a p-type silicon substrate. A layer having a thickness equal to the desired thickness of a flexure area is epitaxially grown of n-type doped silicon over the previously doped p-type substrate. Finally, the p-type doped silicon is etched away by a suitable etchant leaving relatively thick boss areas joined by relatively thin flexure areas.

US Patent:

43338151, Jun 8, 1982

Filed:

Mar 5, 1979

Appl. No.:

6/017299

Inventors:

Theodore Vermeulen - Berkeley CA
Edward A. Grens - Danville CA
Ronald R. Holten - El Cerrito CA

Assignee:

The United States of America as represented by the United States
Department of Energy - Washington DC

International Classification:

C10G 106
C10G 108

US Classification:

208 10

Abstract:

Improved process for liquefaction of coal by contacting pulverized coal in an inorganic-organic medium solvent system containing a ZnCl. sub. 2 catalyst, a polar solvent with the structure RX where X is one of the elements O, N, S or P, and R is hydrogen or a lower hydrocarbon radical; the solvent system can contain a hydrogen donor solvent (and must when RX is water) which is immiscible in the ZnCl. sub. 2 and is a hydroaromatic hydrocarbon, selected from tetralin, dihydrophenanthrene, dihydroanthracene or a hydrogenated coal derived hydroaromatic hydrocarbon distillate fraction.