Theresa D Valentine

US Patent:

7375404, May 20, 2008

Filed:

Dec 3, 2004

Appl. No.:

11/003005

Inventors:

Jung Jin Park - Beltsville MD, US
Reza Ghodssi - Rockville MD, US
Gary W. Rubloff - Clarksville MD, US
Mark Joseph Kastantin - Goleta CA, US
Sheng Li - Greenbelt MD, US
Li-Qun Wu - N. Potomac MD, US
Hyunmin Yi - Beltsville MD, US
Theresa Michelle Valentine - Potomac MD, US

Assignee:

University of Maryland Biotechnology Institute - Baltimore MD
University of Maryland, College Park - College Park MD

International Classification:

H01L 27/14

US Classification:

257414, 257 40

Abstract:

A micro-electro-mechanical system (MEMS) device is provided, along with means for its fabrication and operation for microfluidic and/or biomicrofluidic applications. The MEMS device includes a substrate, optional electrodes on the substrate, a patterned structure on the substrate, the patterned structure having a fluidic microchannel aligned with one or more of the optional electrodes, an encapsulation membrane covering the microchannel, and an optional reactive layer deposited over the electrode in the microchannel. MEMS devices of preferred embodiments permit a leak-tight seal to be formed around the microchannel and fluidic interconnects established for robust operation of fluidics-based processes. MEMS devices of other preferred embodiments permit reversible attachment and separation of the encapsulation membrane relative to the patterned structure.