Thomas S Chen

US Patent:

8389314, Mar 5, 2013

Filed:

Oct 3, 2006

Appl. No.:

11/538281

Inventors:

John R. Martin - Foxborough MA, US
Thomas D. Chen - Cambridge MA, US
Jinbo Kuang - Acton MA, US
Thomas Kieran Nunan - Carlisle MA, US
Xin Zhang - Acton MA, US

Assignee:

Analog Devices, Inc. - Norwood MA

International Classification:

H01L 21/00

US Classification:

438 48, 438691, 257414, 257415, 257E21499, 257E31117

Abstract:

A method of producing a MEMS device provides a MEMS apparatus having released structure. The MEMS apparatus is formed at least in part from an SOI wafer having a first layer, a second layer spaced from the first layer, and an insulator layer between the first layer and second layer. The first layer has a top surface, while the second layer has a bottom surface facing the top surface. After providing the MEMS apparatus, the method increases the roughness of at least the top surface of the first layer or the bottom surface of the second layer.

US Patent:

8455288, Jun 4, 2013

Filed:

Sep 14, 2011

Appl. No.:

13/232282

Inventors:

Kuang L. Yang - Newton MA, US
Thomas D. Chen - Cambridge MA, US

Assignee:

Analog Devices, Inc. - Norwood MA

International Classification:

H01L 21/00

US Classification:

438 53, 216 2

Abstract:

A micromachining process forms a plurality of layers on a wafer. This plurality of layers includes both a support layer and a given layer. The process also forms a mask, with a mask hole, at least in part on the support layer. In this configuration, the support layer is positioned between the mask hole and the given layer, and longitudinally spaces the mask hole from the given layer. The process also etches a feature into the given layer through the mask hole.

US Patent:

8590136, Nov 26, 2013

Filed:

Aug 27, 2010

Appl. No.:

12/870288

Inventors:

Kuang L. Yang - Newton MA, US
Li Chen - Arlington MA, US
Thomas D. Chen - Cambridge MA, US

Assignee:

Analog Devices, Inc. - Norwood MA

International Classification:

H04R 31/00

US Classification:

29594, 29 2541, 295921, 296091, 257704, 257723, 257724, 257729, 381113, 381116, 381171, 381181, 381182, 438 47, 438142

Abstract:

A dual backplate MEMS microphone system including a flexible diaphragm sandwiched between two single-crystal silicon backplates may be formed by fabricating each backplate in a separate wafer, and then transferring one backplate from its wafer to the other wafer, to form two separate capacitors with the diaphragm.

US Patent:

45463891, Oct 8, 1985

Filed:

Jan 3, 1984

Appl. No.:

6/567524

Inventors:

Walter G. Gibson - Princeton NJ
Michael A. Plotnick - Southampton PA
Thomas Y. Chen - Flemington NJ

Assignee:

RCA Corporation - Princeton NJ

International Classification:

H04N 5781

US Classification:

358342

Abstract:

Video disc track numbers are conveyed during each video line by means of a quadrature phase shift keyed data carrier recorded along with the picture and sound carriers on a video disc. Upon playback, the data sequence is processed to identify tracking errors occurring within each video field to thereby enable immediate correction of disc tracking errors on a line-by-line basis thus minimizing picture and sound interruption caused by intra-field tracking errors.

US Patent:

44778414, Oct 16, 1984

Filed:

Oct 6, 1981

Appl. No.:

6/309192

Inventors:

Thomas Y. Chen - East Brunswick NJ
Walter G. Gibson - Princeton NJ

Assignee:

RCA Corporation - New York NY

International Classification:

H04N 576

US Classification:

358335

Abstract:

A filter limits the bandwidth of a caption video signal in a video disc player to minimize color beats when the caption signal is displayed along with a picture video signal on a television receiver. The filter delay, which would otherwise cause offset between the caption and an associated background signal used to enhance visibility of the caption, is compensated for by extending the time duration of each occurrence of the background signal by a multiple of the filter delay.