Thomas T Chen

US Patent:

D559232, Jan 8, 2008

Filed:

Dec 15, 2006

Appl. No.:

29/275152

Inventors:

Wen Ku - Cupertino CA, US
Sally Li - Los Altos CA, US
Thomas Chen - Foster City CA, US
Yi-Wen Chen - Taipei, TW

Assignee:

Fortemedia, Inc. - Cupertino CA
MVOX Technologies, Inc. - Cupertino CA

International Classification:

1401

US Classification:

D14223

US Patent:

20160360322, Dec 8, 2016

Filed:

Jun 8, 2015

Appl. No.:

14/733560

Inventors:

- San Jose CA, US
Michael Daneman - Campbell CA, US
Thomas Chen - Cambridge MA, US

International Classification:

H04R 19/04
H04R 31/00
H04R 7/16

Abstract:

Microelectromechanical microphones include structures that permit differential capacitive sensing. In certain structures, a movable plate is disposed between a rigid plate and a substrate. A first capacitor is formed between the movable plate and the substrate and a second capacitor is formed between the movable plate and the rigid plate. Respective bias voltages can be applied to the rigid plate and the substrate, and a differential capacitive signal can be probed in response to displacement of the movable plate caused by a pressure wave. The movable plate and the rigid plate are mechanically coupled to first and second portions of the substrate, respectively. A dielectric member mechanically couples the movable plate and the rigid plate, thus providing mechanical stability.