Thomas J Conroy

US Patent:

7397046, Jul 8, 2008

Filed:

Dec 29, 2004

Appl. No.:

11/025474

Inventors:

Duofeng Yue - Plano TX, US
Jeffrey Loewecke - Wylie TX, US
JieJie Xu - Plano TX, US
Thomas Patrick Conroy - Carrollton TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

G21K 5/10
H01J 37/08
A61N 5/00

US Classification:

25049221, 2504921, 2504923

Abstract:

Methods () are described for calibrating the implantation angle of an ion implanter utilized in the manufacture of semiconductor products. One method () includes implanting () phosphorous ions into a pilot wafer held by a wafer platen held at a starting implantation angle in the ion implanter. The phosphorous implantation into a p-doped substrate of the pilot or blank wafer, for example, forms a semiconductive sheet. The method () then includes changing the implantation angle (), and implanting another wafer () with phosphorous ions. The angle changing () and implanting () of other wafers continues in this manner until all wafers or angles are implanted () as desired. The phosphorous implanted wafers are then measured () with a four-point probe, for example, to obtain the sheet resistance of all the implanted wafers. The difference between the sheet resistances of the wafers at each corresponding implant angle is then obtained () to determine a functional relationship between the sheet resistance and the implantation angle. Finally, the functional relationship is then used to calibrate () the implantation angle of the implanter.

US Patent:

8552470, Oct 8, 2013

Filed:

Aug 29, 2011

Appl. No.:

13/220227

Inventors:

Yuanning Chen - Plano TX, US
Thomas Patrick Conroy - Dallas TX, US
Jeffrey DeBord - Dallas TX, US
Nagarajan Sridhar - Plano TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H01L 31/102

US Classification:

257184, 257 21, 257 67, 257 77, 257 80, 257 82, 257227, 257228, 257257, 257290, 257292, 257293, 257461, 257E31113, 438 7, 438 19, 438 45, 438 57, 438 59, 438305, 438306, 438371, 438372, 438419, 420451

Abstract:

A photovoltaic cell is provided as a composite unit together with elements of an integrated circuit on a common substrate. In a described embodiment, connections are established between a multiple photovoltaic cell portion and a circuitry portion of an integrated structure to enable self-powering of the circuitry portion by the multiple photovoltaic cell portion.

US Patent:

20130295711, Nov 7, 2013

Filed:

Jul 8, 2013

Appl. No.:

13/936640

Inventors:

Thomas P. Conroy - Dallas TX, US
Jeffrey R. DeBord - Dallas TX, US
Nagarajan Sridhar - Plano TX, US

International Classification:

H01L 31/18

US Classification:

438 59

Abstract:

A photovoltaic cell is provided as a composite unit together with elements of an integrated circuit on a common substrate. In a described embodiment, connections are established between a multiple photovoltaic cell portion and a circuitry portion of an integrated structure to enable self-powering of the circuitry portion by the multiple photovoltaic cell portion.