Thomas R Hoke

US Patent:

20190017172, Jan 17, 2019

Filed:

Jul 10, 2018

Appl. No.:

16/031952

Inventors:

- Kyoto-shi, JP
Thomas Hoke - Irvine CA, US

International Classification:

C23C 16/52
G05B 6/02
C23C 16/455

Abstract:

In order to provide a fluid control apparatus that without enhancing temporal control performance, every time, can stabilize a fluid flow rate achieved by, for example, pulse control, and eliminate fluid wasted at the time of supplying the fluid by including one flow path, a control mechanism includes a first feedback controller adapted to control a first valve on the basis of first pressure measured by a first pressure sensor. In addition, when a second valve is closed, the first pressure feedback controller controls the first valve so that the first pressure measured by the first pressure sensor reaches target burst pressure, and when and after the first pressure reaches the target burst pressure and the second valve is opened, the control mechanism is configured to control the first valve so that the flow rate of the fluid flowing through the flow path reaches a target constant flow rate.

US Patent:

20180356845, Dec 13, 2018

Filed:

Jun 6, 2018

Appl. No.:

16/001890

Inventors:

- Kyoto-shi, JP
Thomas Hoke - Irvine CA, US
Ryan Owens - Irvine CA, US
Maximilian Gundlach - Irvine CA, US
Patrick Lowery - Irvine CA, US
John Dick - Irvine CA, US
Tomohiro Yoshida - Irvine CA, US

International Classification:

G05D 16/06
F16K 11/07
F16K 7/17

Abstract:

Provided is a fluid control device that achieves high sealing performance at full closure, and can suppress damage to a valve body or a valve seat surface even without mechanical accuracy improvements. The fluid control device includes: a fluid control valve provided in a flow path through which fluid flows: and a control mechanism that controls the fluid control valve. The fluid control valve includes: a valve seat surface; a valve body that contacts and separates from the valve seat surface; and an actuator that drives the valve body. Further, the control mechanism includes a speed adjustment part that when the valve body is brought close to the valve seat surface in order to fully close the fluid control valve, and the valve seat surface and the valve body reach a predetermined distance apart, reduces the moving speed of the valve body more than before reaching the predetermined distance.