An RF semiconductor device is fabricated from a starting substrate comprising a polysilicon handle wafer, a buried oxide layer over the polysilicon handle wafer, and a silicon layer over the oxide layer.
A semiconductor device has a silicon layer and a first dielectric layer. A transistor has a drain and a source that are at least partially in the silicon layer. The transistor further has a gate and a spacer defining the gate. The first dielectric layer forms the spacer. A capacitor has first and second electrodes, the first electrode is formed at least partially in the silicon layer, and the first dielectric layer provides a dielectric for the capacitor between the first and second electrodes. A resistor has a resistive region formed at least partially in the silicon layer and has first and second resistor contact areas defined by the first dielectric layer. A second dielectric layer electrically isolates the transistor, the capacitor, and the resistor from conductive lines.
Low Loss Contact Structures For Silicon Based Optical Modulators And Methods Of Manufacture
Thomas Keyser - Plymouth MN, US Cheisan J. Yue - Roseville MN, US
Assignee:
Honeywell International, Inc. - Morristown NJ
International Classification:
G02B 6/42 G02F 1/295
US Classification:
385 40, 385 8
Abstract:
The present invention provides silicon based thin-film structures that can be used to form high frequency optical modulators. Devices of the invention are formed as layered structures that have a thin-film dielectric layer, such as silicon dioxide, sandwiched between silicon layers. In one aspect of the invention an electrical contact structure is provided. The electrical contact structure comprises a connecting portion that electrically connects an active region of at least one of the silicon layers to a contact portion of the electrical contact structure.
Silicon-Insulator-Silicon Thin-Film Structures For Optical Modulators And Methods Of Manufacture
Thomas Keyser - Plymouth MN, US Cheisan J. Yue - Roseville MN, US Bradley J. Larsen - Mound MN, US
Assignee:
Honeywell International, Inc. - Morristown NJ
International Classification:
G02B 1/01 G02B 6/10 H01L 21/302
US Classification:
385 1, 385129, 438719
Abstract:
The present invention provides silicon based thin-film structures that can be used to form high frequency optical modulators. Devices of the invention are formed as layered structures that have a thin-film dielectric layer, such as silicon dioxide, sandwiched between silicon layers. The silicon layers have high free carrier mobility. In one aspect of the invention a high mobility silicon layer can be provided by crystallizing an amorphous silicon layer. In another aspect of the invention, a high mobility silicon layer can be provided by using selective epitaxial growth and extended lateral overgrowth thereof.
Bonded Thin-Film Structures For Optical Modulators And Methods Of Manufacture
Cheisan J. Yue - Roseville MN, US Thomas Keyser - Plymouth MN, US
Assignee:
Honeywell International Inc. - Morristown NJ
International Classification:
H01L 21/00
US Classification:
438 31, 438106, 438455
Abstract:
The present invention provides silicon based thin-film structures that can be used to form high frequency optical modulators. Devices of the invention are formed as layered structures that have a thin-film dielectric layer, such as silicon dioxide, sandwiched between silicon layers. The silicon layers have high free carrier mobility. In one aspect of the invention a single crystal silicon material is bonded to a thin-film dielectric material to form a silicon-insulator-silicon thin-film structure for an optical modulator.
System And Method For Uniform Multi-Plane Silicon Oxide Layer Formation For Optical Applications
Methods and systems for growing uniform oxide layers include an example method including growing a first layer of oxide on first and second facets of the substrate, with the first facet having a faster oxide growth rate. The oxide is removed from the first facet and a second oxide layer is grown on the first and second facets. Removing the oxide from the first facet includes shielding the second facet and exposing the substrate to a deoxidizing condition. The second facet is then exposed to receive the second oxide layer. Areas having differing oxide thicknesses are also grown by repeatedly growing oxide layers, selectively shielding areas, and removing oxide from exposed areas.
An optoelectronic coupling structure, a method of manufacture, and a method of operation are described. The optical coupling structure includes a waveguide that is formed within a device layer of an SOI substrate. A prism is located on a bottom side of the SOI substrate. A BOX layer of the SOI substrate, which is interposed between the prism and the waveguide, serves as a spacer region, which promotes an optical coupling of the prism to the waveguide. By positioning the prism below the waveguide, an optoelectronic IC may more readily accommodate a prism. The prism may be directly fabricated in a bulk layer of the SOI substrate or directly bonded to a bottom side surface of the BOX layer.
Integrated Optical Rotation Sensor And Method For Sensing Rotation Rate
Thomas Keyser - Plymouth MN, US Glen A. Sanders - Scottsdale AZ, US Grenville Hughes - Wayzata MN, US Lee K. Strandjord - Tonka Bay MN, US
Assignee:
Honeywell International, Inc. - Morristown NJ
International Classification:
G01C 19/72 G01C 19/66 G02B 6/00
US Classification:
356461, 356469, 356470, 385 12
Abstract:
Methods and apparatus are provided for a low cost optical gyro using thin film waveguides to direct light beams among the components of the gyro. The gyro includes a substrate having an insulator layer, a silicon waveguide formed on the insulator layer, and a resonator coupled to the silicon waveguide and configured to circulate a portion of a first light beam in a first counter-propagating direction and circulate a portion of a second light beam in a second counter-propagating direction. The first silicon waveguide propagates the first and second light beams therethrough. Each of the first and second light beams has a resonance frequency when circulating in the resonator.
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