Thomas E Nolan

US Patent:

20130209835, Aug 15, 2013

Filed:

Mar 15, 2013

Appl. No.:

13/836521

Inventors:

SEAGATE TECHNOLOGY LLC - , US
Yonghua Chen - Bloomington MN, US
Ganping Ju - Pleasanton CA, US
Thomas P. Nolan - Fremont CA, US

Assignee:

SEAGATE TECHNOLOGY LLC - Cupertino CA

International Classification:

G11B 5/84
G11B 5/64
G11B 5/66

US Classification:

428829, 148121

Abstract:

A method involves depositing a seed layer comprising at least A1 phase FePt. A main layer of A1 phase FePt is deposited over the seed layer. The main layer includes FePt of a different stoichiometry than the seed layer. The seed and main layers are annealed to convert the A1 phase FePt to L10 phase FePt. The annealing involves heating the substrate prior to depositing at least part of the A1 phase FePt of the main or seed layers.

US Patent:

20170092317, Mar 30, 2017

Filed:

Dec 12, 2016

Appl. No.:

15/376043

Inventors:

- Cupertino CA, US
Yonghua Chen - Edina MN, US
Ganping Ju - Pleasanton CA, US
Thomas P. Nolan - Fremont CA, US

International Classification:

G11B 5/85
C22C 5/04
C22F 1/14
C23C 14/16
C23C 14/34
G11B 5/851
C23C 14/22
C23C 14/28
C23C 14/58
G11B 5/65
G11B 5/73
B32B 15/01
C23C 14/35

Abstract:

One embodiment described herein is directed to a method involving depositing a seed layer on a substrate, the seed layer comprising A1 phase FePt with a ratio of Pt of Fe greater than 1:1. A main layer is deposited on the seed layer, the main layer comprising A1 phase FePt with a ratio of Pt to Fe of approximately 1:1. A cap layer is deposited on the main layer, the cap layer comprising A1 phase FePt with a ratio of Pt to Fe of less than 1:1. The seed, main and cap layers are annealed to convert the A1 phase FePt to L1phase FePt having a graded FePt structure of varying stoichimetry from approximately FePtadjacent a lower portion of the structure proximate the substrate to FePtadjacent an upper portion of the structure opposite the lower portion.